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公开(公告)号：US10571433B2
公开(公告)日：2020-02-25
申请号：US15651221
申请日：2017-07-17
申请人： Sonix, Inc.
发明人： Paul Ivan John Keeton , James Christopher Patrick McKeon , Michael Lemley Wright , Kevin John Brault
摘要： An adjustable fixture for holding a sample for inspection with a scanning acoustic microscope includes a first horizontal bar disposed on a first end of a frame, and a second horizontal bar disposed on a second end of the frame. The second horizontal bar may be engaged with the frame to be movable between the first end and the second end of the frame. The adjustable fixture may further include a side bar disposed on one or more of the first side and the second side of the frame, with an end of the second horizontal bar slidable and lockable along the side bar, and an engagement mechanism releasably coupling the end of the second horizontal bar to the side bar.
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公开(公告)号：US20210356439A1
公开(公告)日：2021-11-18
申请号：US17282817
申请日：2019-10-03
申请人： Sonix, Inc.
发明人： Young-Shin Kwon , James Christopher Patrick McKeon , Paul Ivan John Keeton , Michael Lemley Wright
摘要： A coupler and a chuck are described. The chuck is configured to secure an article while the wafer is undergoing an inspection process. The chuck has a plurality of vacuum areas. Some vacuum areas hold the wafer in place while other vacuum areas suction couplant from the edge surface of the wafer. The coupler is used to inspect a surface and subsurface of the wafer for defects and includes a sensing device, which may be a transducer. One or more couplant inlet couplings are disposed on a second portion of the coupler, the couplant inlet couplings provide a couplant to a portion of the wafer inspected by the sensing device. A plurality of vacuum inlet couplings is disposed on a third portion of the coupler. At least one of the vacuum inlet couplings provide suction through a recessed portion of a lower surface of the coupler to remove couplant that is outside the portion of the wafer that is being inspected by the sensing device.
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