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公开(公告)号:US20220037138A1
公开(公告)日:2022-02-03
申请号:US17497342
申请日:2021-10-08
IPC分类号: H01J45/00
摘要: A small-gap device system, preferably including two or more electrodes and one or more spacers maintaining a gap between two or more of the electrodes. A spacer for a small-gap device system, preferably including a plurality of legs defining a mesh structure. A method of spacer and/or small-gap device fabrication, preferably including: defining lateral features, depositing spacer material, selectively removing spacer material, separating the spacer from a fabrication substrate, and/or assembling the small-gap device.
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公开(公告)号:US20230420233A1
公开(公告)日:2023-12-28
申请号:US18243972
申请日:2023-09-08
IPC分类号: H01J45/00
CPC分类号: H01J45/00
摘要: A small-gap device system, preferably including two or more electrodes and one or more spacers maintaining a gap between two or more of the electrodes. A spacer for a small-gap device system, preferably including a plurality of legs defining a mesh structure. A method of spacer and/or small-gap device fabrication, preferably including: defining lateral features, depositing spacer material, selectively removing spacer material, separating the spacer from a fabrication substrate, and/or assembling the small-gap device.
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公开(公告)号:US11791143B2
公开(公告)日:2023-10-17
申请号:US17497342
申请日:2021-10-08
IPC分类号: H01J45/00
CPC分类号: H01J45/00
摘要: A small-gap device system, preferably including two or more electrodes and one or more spacers maintaining a gap between two or more of the electrodes. A spacer for a small-gap device system, preferably including a plurality of legs defining a mesh structure. A method of spacer and/or small-gap device fabrication, preferably including: defining lateral features, depositing spacer material, selectively removing spacer material, separating the spacer from a fabrication substrate, and/or assembling the small-gap device.
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公开(公告)号:US11170984B2
公开(公告)日:2021-11-09
申请号:US16044215
申请日:2018-07-24
摘要: A small-gap device system, preferably including two or more electrodes and one or more spacers maintaining a gap between two or more of the electrodes. A spacer for a small-gap device system, preferably including a plurality of legs defining a mesh structure. A method of spacer and/or small-gap device fabrication, preferably including: defining lateral features, depositing spacer material, selectively removing spacer material, separating the spacer from a fabrication substrate, and/or assembling the small-gap device.
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公开(公告)号:US20190027347A1
公开(公告)日:2019-01-24
申请号:US16044215
申请日:2018-07-24
IPC分类号: H01J45/00
摘要: A small-gap device system, preferably including two or more electrodes and one or more spacers maintaining a gap between two or more of the electrodes. A spacer for a small-gap device system, preferably including a plurality of legs defining a mesh structure. A method of spacer and/or small-gap device fabrication, preferably including: defining lateral features, depositing spacer material, selectively removing spacer material, separating the spacer from a fabrication substrate, and/or assembling the small-gap device.
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