公开(公告)号：US4263336A

公开(公告)日：1981-04-21

申请号：US98098

申请日：1979-11-23

申请人： Stephen W. Thompson ,  Harry G. Smith ,  Richard S. Rosler

发明人： Stephen W. Thompson ,  Harry G. Smith ,  Richard S. Rosler

IPC分类号： C23C16/46 ,  C30B25/10 ,  C23C11/06

CPC分类号： C30B25/10 ,  C23C16/46

摘要： A reduced pressure induction heated reactor and method for the deposition, especially epitaxial deposition, onto workpieces placed in the reactor. The workpieces are positioned within a hollow susceptor which is, in turn, positioned within a reactor tube. The ends of the reactor tube are sealed by end caps which provide for input and exhaust of reactant species. The workpieces are inductively heated by an RF induction coil which surrounds the reactor tube and which inductively couples with the susceptor. A vacuum pump maintains a low pressure within the reactor tube. Low pressure deposition is made possible without arcing by shorting together the susceptor and end caps and by having the shorted together combination electrically floating.

摘要翻译： 一种减压感应加热反应器和用于在放置在反应器中的工件上沉积，特别是外延沉积的方法。 工件位于中空基座内，中空基座又位于反应器管内。 反应器管的端部由提供反应物种类的输入和排出的端盖密封。 工件由围绕反应器管的RF感应线圈感应加热，并且与感受器感应耦合。 真空泵在反应器管内保持低压。 通过将基座和端盖短接在一起，并且使短路在一起的组合电浮动，可以实现低压沉积。