公开(公告)号：US20200041563A1

公开(公告)日：2020-02-06

申请号：US16527142

申请日：2019-07-31

申请人： Stichting VU

发明人： Patricius Aloysius Jacobus TINNEMANS ,  Patrick WARNAAR ,  Vasco Tomas Tenner ,  Maurits Van der schaar

IPC分类号： G01R31/265

摘要： Disclosed is a method for obtaining a computationally determined interference electric field describing scattering of radiation by a pair of structures comprising a first structure and a second structure on a substrate. The method comprises determining a first electric field relating to first radiation scattered by the first structure; determining a second electric field relating to second radiation scattered by the second structure; and computationally determining the interference of the first electric field and second electric field, to obtain a computationally determined interference electric field.