公开(公告)号：US20130335354A1

公开(公告)日：2013-12-19

申请号：US13917501

申请日：2013-06-13

Applicant: Strategic Polymer Sciences, Inc.

Inventor： Brian C. Zellers ,  Thomas Tremper ,  Raymond Orchard, JR. ,  Christophe Ramstein

IPC: H01L41/09 ,  H01L41/193 ,  G06F3/01

CPC classification number: H01L41/0926 ,  G06F3/016 ,  G06F2203/04103 ,  H01L41/083 ,  H01L41/193

Abstract: An inertial actuator includes an electro-active polymer EAP actuator, a substrate, and one or more mass elements. The EAP actuator includes at least one EAP layer located between a pair of driving electrodes. The EAP actuator may include a multilayer stack of alternating EAP layers and electrode layers. The EAP actuator is attached to the substrate (e.g., a flexible polymer substrate), which may be held under tension by attachment points at the periphery of the substrate, at the ends of a beam-type substrate, or the edges of a membrane-type actuator. The EMP actuator induces vibrations in the substrate. One or more mass elements (e.g., metal films) may also be supported by the substrate to enhance the resonator response.

Abstract translation: 惯性致动器包括电活性聚合物EAP致动器，衬底和一个或多个质量元件。 EAP致动器包括位于一对驱动电极之间的至少一个EAP层。 EAP致动器可以包括交替的EAP层和电极层的多层堆叠。 EAP致动器附接到基板（例如，柔性聚合物基板），其可以通过在基板的周边处的附接点，在梁型基板的端部处的张力保持，或者膜 - 型致动器。 EMP致动器在基板中引起振动。 一个或多个质量元件（例如，金属膜）也可由衬底支撑以增强谐振器响应。

公开(公告)号：US09705068B2

公开(公告)日：2017-07-11

申请号：US13917501

申请日：2013-06-13

Applicant: Strategic Polymer Sciences, Inc.

Inventor： Brian C. Zellers ,  Thomas Tremper ,  Raymond Orchard, Jr. ,  Christophe Ramstein

IPC: G06F3/01 ,  H01L41/09 ,  H01L41/193 ,  H01L41/083

CPC classification number: H01L41/0926 ,  G06F3/016 ,  G06F2203/04103 ,  H01L41/083 ,  H01L41/193

Abstract: An inertial actuator includes an electro-active polymer EAP actuator, a substrate, and one or more mass elements. The EAP actuator includes at least one EAP layer located between a pair of driving electrodes. The EAP actuator may include a multilayer stack of alternating EAP layers and electrode layers. The EAP actuator is attached to the substrate (e.g., a flexible polymer substrate), which may be held under tension by attachment points at the periphery of the substrate, at the ends of a beam-type substrate, or the edges of a membrane-type actuator. The EMP actuator induces vibrations in the substrate. One or more mass elements (e.g., metal films) may also be supported by the substrate to enhance the resonator response.