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公开(公告)号:US20210055627A1
公开(公告)日:2021-02-25
申请号:US16501134
申请日:2020-07-10
申请人: Su-Peng Yu , Scott B. Papp , David Carlson , Kartik Srinivasan , Hojoog Jung
发明人: Su-Peng Yu , Scott B. Papp , David Carlson , Kartik Srinivasan , Hojoog Jung
摘要: A tantala ring resonator includes a tantala ring resonator formed by ion-beam sputtering of tantalum pentoxide and exhibiting an optical quality factor in excess of 3×106, and a substrate to which the tantala ring resonator is attached. A method for fabricating nonlinear photonic devices includes depositing tantalum pentoxide with ion-beam sputtering to form a tantala layer onto a substrate, annealing the tantala layer, and etching the tantala layer to form a photonic device.