Optical waveguide device
    1.
    发明授权

    公开(公告)号:US11656486B2

    公开(公告)日:2023-05-23

    申请号:US17129576

    申请日:2020-12-21

    IPC分类号: G02F1/035 G02F1/225

    摘要: An optical waveguide device including an optical waveguide substrate that has an electro-optic effect, is a crystal having anisotropy in thermal expansion rate, has a thickness set to 10 μm or lower, and includes an optical waveguide and a holding substrate that holds the optical waveguide substrate, the optical waveguide substrate and the holding substrate being joined to each other, in which the holding substrate is formed of a crystal having a lower dielectric constant than the optical waveguide substrate and having anisotropy in thermal expansion rate, and the optical waveguide substrate and the holding substrate are joined to each other such that differences in thermal expansion rate between the optical waveguide substrate and the holding substrate become small in different axial directions on a joint surface.

    OPTICAL WAVEGUIDE ELEMENT AND OPTICAL WAVEGUIDE DEVICE

    公开(公告)号:US20220163720A1

    公开(公告)日:2022-05-26

    申请号:US17599721

    申请日:2019-09-26

    摘要: In an optical waveguide element, performance deterioration due to recoupling of unnecessary light leaking from an optical waveguide with the optical waveguide is prevented. An optical waveguide element includes an optical substrate on which an optical waveguide is formed, and a support substrate that is bonded to the optical substrate, on a bonded surface of the support substrate bonded to the optical substrate, a recess portion along the optical waveguide on the optical substrate is formed directly under the optical waveguide, a portion of the support substrate from an upper surface of the support substrate to at least a depth of a bottom surface of the recess portion has a refractive index higher than a substrate refractive index of the optical substrate, and the recess portion is filled with a substance having a refractive index lower than the substrate refractive index.