公开(公告)号：US20180287045A1

公开(公告)日：2018-10-04

申请号：US15758999

申请日：2016-08-31

Applicant: Sumitomo Precision Products Co., Ltd.

Inventor： Yusuke TABUCHI ,  Gen MATSUOKA ,  Takashi IKEDA

IPC: H01L41/047 ,  H01L41/053 ,  H01L41/23 ,  H01L41/29

Abstract: This piezoelectric element includes a lower electrode formed on a substrate, a piezoelectric layer formed on the lower electrode, and an upper electrode formed on the piezoelectric layer. The upper electrode includes a first upper electrode layer made of a metal oxide including an amorphous portion at least at a boundary with the piezoelectric layer and a second upper electrode layer formed on the first upper electrode layer.