公开(公告)号：US20200300628A1

公开(公告)日：2020-09-24

申请号：US16649474

申请日：2018-09-18

Applicant: Sumitomo Precision Products Co., Ltd.

Inventor： Ryohei UCHINO ,  Takashi IKEDA

IPC: G01C19/5684 ,  B81B3/00 ,  G01C19/5719 ,  H01L29/84

Abstract: An angular rate sensor includes an annular resonator. The resonator includes an annular base material made of a first material, and an annular first low thermal conductor made of a second material having a lower thermal conductivity than the first material, the first low thermal conductor being sandwiched between an annular first region and an annular second region on an inner side of the first region in the base material over substantially an entire circumference of the resonator.

公开(公告)号：US20190277879A1

公开(公告)日：2019-09-12

申请号：US16333738

申请日：2017-09-13

Applicant: Sumitomo Precision Products Co., Ltd.

Inventor： Takashi IKEDA ,  Hiroshi TANAKA ,  Mario KIUCHI

IPC: G01P15/135 ,  G01P15/125 ,  B81B7/02

Abstract: This accelerometer (100) includes a substrate (30) and a bonding member (90) that bonds the substrate (30) and a supporting member (50) to each other, and the bonding member (90) is arranged in a region (R3) that straddles a first region (R1) in which a first sensor element (11) is arranged and a second region (R2) in which a second sensor element (12) is arranged in a plan view.

公开(公告)号：US20180287045A1

公开(公告)日：2018-10-04

申请号：US15758999

申请日：2016-08-31

Applicant: Sumitomo Precision Products Co., Ltd.

Inventor： Yusuke TABUCHI ,  Gen MATSUOKA ,  Takashi IKEDA

IPC: H01L41/047 ,  H01L41/053 ,  H01L41/23 ,  H01L41/29

Abstract: This piezoelectric element includes a lower electrode formed on a substrate, a piezoelectric layer formed on the lower electrode, and an upper electrode formed on the piezoelectric layer. The upper electrode includes a first upper electrode layer made of a metal oxide including an amorphous portion at least at a boundary with the piezoelectric layer and a second upper electrode layer formed on the first upper electrode layer.