公开(公告)号：US20160083864A1

公开(公告)日：2016-03-24

申请号：US14857880

申请日：2015-09-18

Applicant: SunEdison, Inc.

Inventor： Steven Lawrence Kimbel ,  Benjamin Michael Meyer ,  Salvador Zepeda ,  Steven John Ferguson

IPC: C30B15/10

CPC classification number: C30B15/10 ,  C30B15/002 ,  C30B15/02 ,  Y10T117/10 ,  Y10T117/1032 ,  Y10T117/106 ,  Y10T117/1068

Abstract: A crystal puller for growing a crystal ingot includes a housing, insulation, a crucible assembly, a heat shield, and a dust barrier. The housing encloses a growth chamber, and has an upper wall with an inner surface and an aperture. The insulation separates an inside of the housing into an upper area and a lower area, and has a central opening. The crucible assembly is within the lower area to contain the melt. The heat shield is adjacent the central opening of the insulation, and forms a labyrinth gas path with the crucible assembly. The dust barrier extends from the inner surface of the upper wall to one of the insulation and the heat shield, and forms a seal with the upper wall around the aperture to inhibit particles from entering the growth chamber through the upper area of the housing.

Abstract translation: 用于生长晶体锭的晶体拉拔器包括壳体，绝缘体，坩埚组件，隔热罩和防尘屏障。 壳体包围生长室，并且具有带有内表面和孔的上壁。 绝缘体将壳体的内部分隔成上部区域和下部区域，并且具有中心开口。 坩埚组件在容纳熔体的下部区域内。 隔热板靠近绝缘体的中心开口，并与坩埚组件形成迷宫式气路。 防尘屏障从上壁的内表面延伸到绝缘层和隔热层之一，并且与孔周围的上壁形成密封，以防止颗粒通过壳体的上部区域进入生长室。