公开(公告)号：US20200241150A1

公开(公告)日：2020-07-30

申请号：US16756843

申请日：2017-10-24

Applicant: System Square Inc.

Inventor： Noriaki IKEDA ,  Junji MORIYAMA

IPC: G01T1/16 ,  H01L27/146 ,  G01T1/29

Abstract: An electromagnetic wave detection module in which wiring is formed to connect each detection element of an electromagnetic wave detection means configured by arranging a plurality of detection elements for detecting an electromagnetic wave in a two-dimensional array and a predetermined connection destination outside the electromagnetic wave detection means with good manufacturability and so as not to cause trouble in the detection of an electromagnetic wave as much as possible. A detection element group includes M detection elements (M is an integer of 2 or more) arranged in the Y-axis direction is arranged in N rows (N is an integer of 2 or more) in the X-axis direction orthogonal to the Y-axis direction, and M×N wirings electrically connecting each of the M×N detection elements and a predetermined connection destination outside any one end of the electromagnetic wave detection means in the Y-axis direction are provided on the common substrate surface.