公开(公告)号：US20110187236A1

公开(公告)日：2011-08-04

申请号：US13085588

申请日：2011-04-13

申请人： Syunsuke SATOH ,  Shinichi KOYAMA

发明人： Syunsuke SATOH ,  Shinichi KOYAMA

IPC分类号： H01L41/053

CPC分类号： H03H9/1021 ,  H03H9/17 ,  H03H9/21 ,  Y10T29/42

摘要： A piezoelectric resonator device comprises a piezoelectric resonator plate, a base for holding the piezoelectric resonator plate, a lid for hermetically enclosing the piezoelectric resonator plate held on the base, and a support member made of a brittle material for reducing external stress to the piezoelectric resonator plate. The piezoelectric resonator plate is held on the base via a support member. In this case, the base, the piezoelectric resonator plate, and the support member are bonded with each other using a base bonding member and a piezoelectric resonator plate bonding member (connection bumps) by FCB using ultrasonic waves. The base is electrically and mechanically bonded with the support member via the base bonding member in a plurality of areas of the support member using ultrasonic waves. Also, the piezoelectric resonator plate is electrically and mechanically bonded with the support member via the piezoelectric resonator plate bonding member in an area of the piezoelectric resonator plate using ultrasonic waves.

摘要翻译： 一种压电谐振器装置，包括压电谐振器板，用于保持压电谐振器板的基座，用于气密地封闭保持在基座上的压电谐振器板的盖子和由用于减小压电谐振器的外部应力的脆性材料制成的支撑构件 盘子。 压电谐振器板通过支撑构件保持在基座上。 在这种情况下，通过使用超声波的FCB，使用基极接合部件和压电谐振器板接合部件（连接凸起），基体，压电谐振器板和支撑部件彼此接合。 该基座通过使用超声波的支撑构件的多个区域中的基底接合构件与支撑构件电气机械地接合。 此外，压电谐振器板通过使用超声波的压电谐振器板的区域中的压电谐振器板接合部件与支撑部件电气机械地接合。