公开(公告)号：US20200050725A1

公开(公告)日：2020-02-13

申请号：US16660506

申请日：2019-10-22

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

发明人： Chia-Ping CHIANG ,  Ming-Hui CHIH ,  Chih-Wei HSU ,  Ping-Chieh WU ,  Ya-Ting CHANG ,  Tsung-Yu WANG ,  Wen-Li CHENG ,  Hui En YIN ,  Wen-Chun HUANG ,  Ru-Gun LIU ,  Tsai-Sheng GAU

IPC分类号： G06F17/50 ,  G03F7/20 ,  G03F1/70

摘要： Implementations of the present disclosure provide coloring methods that sort and pre-color nodes of G0-linked networks in a multiple-patterning technology (MPT)-compliant layout design by coordinate. In one embodiment, a method includes identifying target networks in a circuit layout, each target network having two or more linked nodes representing circuit patterns, and each target network being presented in an imaginary X-Y coordinate plane, assigning a first feature to a first node in each target network, the first node is determined using a coordinate-based method, and assigning the first feature and a second feature to remaining nodes in each target network in an alternating manner so that any two immediately adjacent linked nodes in each target network have different features.

公开(公告)号：US20210019464A1

公开(公告)日：2021-01-21

申请号：US17063429

申请日：2020-10-05

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

发明人： Chia-Ping CHIANG ,  Ming-Hui CHIH ,  Chih-Wei HSU ,  Ping-Chieh WU ,  Ya-Ting CHANG ,  Tsung-Yu WANG ,  Wen-Li CHENG ,  Hui En YIN ,  Wen-Chun HUANG ,  Ru-Gun LIU ,  Tsai-Sheng GAU

IPC分类号： G06F30/39 ,  G03F1/70 ,  G03F7/20

摘要： Implementations of the present disclosure provide coloring methods that sort and pre-color nodes of G0-linked networks in a multiple-patterning technology (MPT)-compliant layout design by coordinate. In one embodiment, a method includes identifying target networks in a circuit layout, each target network having two or more linked nodes representing circuit patterns, and each target network being presented in an imaginary X-Y coordinate plane, assigning a first feature to a first node in each target network, the first node is determined using a coordinate-based method, and assigning the first feature and a second feature to remaining nodes in each target network in an alternating manner so that any two immediately adjacent linked nodes in each target network have different features.