公开(公告)号：US20210356318A1

公开(公告)日：2021-11-18

申请号：US17390172

申请日：2021-07-30

Applicant: TAIYO YUDEN CO., LTD.

Inventor： Junji OSHITA ,  Isao MATSUDA ,  Takao SHIBUYA ,  Sakae MOTEGI ,  Hiroki HORIUCHI

IPC: G01H11/08 ,  H01L41/04 ,  H01L41/047 ,  H01L41/053 ,  H01L41/113 ,  H01L41/23

Abstract: A vibration sensor according to an embodiment includes a substrate, a convex member, and a piezoelectric element. The substrate includes a first principal surface and a second principal surface. The substrate transmits vibration. The convex member is fixed on the first principal surface. The piezoelectric element is disposed within a second fixing region on the second principal surface. The second fixing region corresponds to, in a planar view, a first fixing region of the substrate on which the convex member is fixed.