公开(公告)号：US20140322063A1

公开(公告)日：2014-10-30

申请号：US14330786

申请日：2014-07-14

申请人： TANAKA KIKINZOKU KOGIO K.K.

发明人： Takanobu MIYASHITA ,  Yasuyuki GOTO ,  Takamichi YAMAMOTO ,  Ryousuke KUSHIBIKI ,  Masahiro AONO ,  Masahiro NISHIURA

IPC分类号： C23C14/34 ,  B22F3/12

CPC分类号： B22F3/12 ,  B22F9/04 ,  B22F9/08 ,  B22F9/082 ,  B22F2201/03 ,  B22F2999/00 ,  C22C1/0466 ,  C22C1/05 ,  C22C1/10 ,  C22C5/04 ,  C22C32/00 ,  C22C38/002 ,  C22C38/16 ,  C23C14/0635 ,  C23C14/34 ,  C23C14/3414 ,  G11B5/851 ,  H01J37/3429 ,  H01J37/3491 ,  H01J2237/3322 ,  H01J2237/3323

摘要： A process for producing an FePt-based sputtering target includes adding metal oxide powder containing unavoidable impurities to FePt-based alloy powder containing Pt in an amount of 40 at % or more and less than 60 at % and one or more kinds of metal elements other than Fe and Pt in an amount of more than 0 at % and 20 at % or less with the balance being Fe and unavoidable impurities and with a total amount of Pt and the one or more kinds of metal elements being 60 at % or less so that the metal oxide powder accounts for 20 vol % or more and 40 vol % or less of a total amount of the FePt-based alloy powder and the metal oxide powder, followed by mixing the FePt-based alloy powder and the metal oxide powder to produce a powder mixture.

摘要翻译： 一种FePt系溅射靶的制造方法，其特征在于，在含有40质量％以上且小于等于60原子％的Pt的FePt系合金粉末中添加含有不可避免的杂质的金属氧化物粉末和其他金属元素 比Fe和Pt大于0at％和20at％或更少，余量为Fe和不可避免的杂质，并且Pt的总量和一种或多种金属元素的含量为60原子％以下，Fe 金属氧化物粉末占FePt系合金粉末和金属氧化物粉末总量的20体积％以上且40体积％以下，然后将FePt系合金粉末和金属氧化物粉末混合到 产生粉末混合物。