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公开(公告)号:US20250029867A1
公开(公告)日:2025-01-23
申请号:US18548535
申请日:2023-07-31
Inventor: Mengcheng QU , Rui WU , Dawei BAI , Zhijun WU , Zhengmin CAO , Ruipeng LI , Dawei WANG , Yao WAN , Xianzheng YIN , Chen YANG
IPC: H01L21/687
Abstract: A material frame unlocking device may include a material frame and an insert slot, a clamping mechanism for clamping a silicon wafer is arranged on the material frame, and an unlocking mechanism for fitting the clamping mechanism is arranged on the insert slot. The clamping mechanism includes two clamping rods capable of opening and closing movements, an end of each of the two clamping rods is provided with a connecting rod, a middle portion of the connecting rod is provided with a hinge point, and an elastic assembly is arranged at one end of the connecting rod away from respective clamping rod, when the elastic assembly is controlled by the unlocking mechanism, the connecting rod rotates around the hinge point, and the two clamping rods are opened to separate the two clamping rods from each other.