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公开(公告)号：US20230069468A1
公开(公告)日：2023-03-02
申请号：US17797213
申请日：2021-01-20
Applicant: TDK Corporation
Inventor： Shinji Iwatsuka , Hiroki HARA , Anthony Reymund Melad BINARAO , Cheng Bu HENG , Hiroshi TAKE , Kenji NAGASE
IPC: G02F1/035
Abstract: An optical waveguide element includes: an optical waveguide having a ridge part and a slab part having a thickness less than the ridge part. The optical waveguide includes: a first waveguide having a first ridge with and a first slab film thickness; a second waveguide having a second ridge width and a second slab film thickness; a first intermediate waveguide connected to the first waveguide and having a third ridge width and the first slab film thickness; and a second intermediate waveguide connected to the second waveguide and having a fourth ridge width and the second slab film thickness. The first waveguide, the first intermediate waveguide, the second intermediate waveguide, and the second waveguide are arranged in this order; the second slab film thickness is larger than the first slab film thickness; and the third ridge width is larger than the fourth ridge width.
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公开(公告)号：US20230036811A1
公开(公告)日：2023-02-02
申请号：US17716440
申请日：2022-04-08
Applicant: TDK CORPORATION
Inventor： Kenji NAGASE , Hiroshi TAKE , Anthony Reymund Melad BINARAO , Cheng Bu HENG
Abstract: The invention relates to an optical modulator. The optical modulator comprising: a substrate; an electro-optical material layer formed on a predetermined region of the substrate; a buffer layer formed on the substrate which is provided so as to cover the electro-optical material layer; and an electrode formed on the buffer layer, and the electro-optical material layer has a RF portion optical waveguide which is applied with a modulation signal and is patterned, and a DC portion optical waveguide which is applied with a DC voltage and is patterned, the electrode has an RF portion electrode formed on the buffer layer where the RF portion optical waveguide is located and a DC portion electrode formed on the buffer layer where the DC portion optical waveguide is located, the film thickness of the DC portion electrode is smaller than the film thickness of the RF portion electrode. According to the present invention, an optical modulator which can suppress electrical crosstalk caused by the noise signal generated in the DC portion electrode and can improve high-frequency characteristics and achieve a widening of bandwidth of the optical frequency band in the high-frequency signals propagating in the RF portion electrode is provided.
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公开(公告)号：US20230375781A1
公开(公告)日：2023-11-23
申请号：US18028354
申请日：2021-09-29
Applicant: TDK CORPORATION
Inventor： Hiroshi TAKE , Kenji NAGASE , Anthony Reymund Melad BINARAO , Cheng Bu HENG
IPC: G02B6/12
CPC classification number: G02B6/12007 , G02B2006/12097
Abstract: An electro-optic device which is provided with: a substrate, an optical waveguide formed on the substrate, and an upper electrode formed on the optical waveguide. The electro-optic device is further provided with a buffer layer formed between the substrate and the upper electrode, and a boundary portion of the optical waveguide and the buffer layer forms an oxide layer different from the optical waveguide and the buffer layer in composition.
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公开(公告)号：US20230057036A1
公开(公告)日：2023-02-23
申请号：US17797207
申请日：2021-01-20
Applicant: TDK Corporation
Inventor： Anthony Reymund Melad Binarao , Cheng Bu HENG , Hiroshi TAKE , Kenji NAGASE , Shinji IWATSUKA , Hiroki HARA
Abstract: To provide an optical modulation element whereby reduced drive voltage and suppression of DC drift can be obtained at the same time. An optical modulation element includes: a substrate; and an optical waveguide formed of an electrooptic material film formed on the substrate and having a ridge part which is a protruding portion, and a slab part having a smaller film thickness than the ridge part 11r. The optical waveguide includes a first waveguide part having a first ridge width and a first slab film thickness and to which an RF signal is applied, and a second waveguide part having a second ridge width and a second slab film thickness different from the first slab film thickness and to which a DC bias is applied.
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公开(公告)号：US20220326554A1
公开(公告)日：2022-10-13
申请号：US17707117
申请日：2022-03-29
Applicant: TDK CORPORATION
Inventor： Hiroshi TAKE , Kenji NAGASE , Anthony Reymund Melad BINARAO , Cheng Bu HENG
Abstract: An electro-optical device includes a substrate, an optical waveguide formed on the substrate, a buffer layer formed on the substrate which is provided so as to cover the optical waveguide and an electrode formed on the buffer layer, when viewed in a propagation direction of light, a side surface of the optical waveguide has at least one slope change point. An electro-optical device can reduce the driving voltage and provide the propagation loss of light.
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Patent Agency Ranking
公开(公告)号：US20220317358A1
公开(公告)日：2022-10-06
申请号：US17707055
申请日：2022-03-29
Applicant: TDK CORPORATION
Inventor： Kenji NAGASE , Hiroshi TAKE , Anthony Reymund Melad BINARAO , Cheng Bu HENG
IPC: F21V8/00
Abstract: An optical device including: a substrate; an optical waveguide formed at the substrate; and a protective layer formed adjacent to the optical waveguide, wherein the optical waveguide includes multiple side surfaces that intersect the substrate, at least one side surface of the optical waveguide is provided with a rough surface. According to the optical device of the present invention, the light propagation loss can be reduced.
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公开(公告)号：US20230314710A1
公开(公告)日：2023-10-05
申请号：US18191050
申请日：2023-03-28
Applicant: TDK CORPORATION
Inventor： Kenji NAGASE , Hiroshi TAKE , Anthony Reymund Melad BINARAO , Cheng Bu HENG
IPC: G02B6/125
CPC classification number: G02B6/125 , G02B2006/12097
Abstract: The present invention provides an optical device and an optical modulator, the optical device comprises an optical waveguide, at an surface of plate-like or film-like electro-optic material forming the optical waveguide, 3 locations are selected in the extension direction of the optical waveguide, and 2 locations are selected in the width direction of the optical waveguide in a range of a region of 0.1×0.1 μm, and for a total of 6 locations, an surface roughness RMS is measured with Atomic Force Microscope, and an average of the RMS is 5.1 nm or less. According to the optical device in the present invention, the occurrence of micro-cracks at the optical waveguide can be suppressed, thereby reducing the light propagation loss.
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公开(公告)号：US20230124507A1
公开(公告)日：2023-04-20
申请号：US17914610
申请日：2021-03-31
Applicant: TDK CORPORATION
Inventor： Kenji NAGASE , Anthony Reymund Melad BINARAO , Cheng Bu HENG , Hiroshi TAKE
Abstract: An electro-optical device includes an optical waveguide and an upper electrode provided on the optical waveguide, the optical waveguide is formed by turning back on a plane, the upper electrode has adjacent parts by turning back the optical waveguide, and an upper layer higher than the upper electrode between the adjacent parts includes a metal layer. Alternatively, an electro-optic device includes a plurality of Mach-Zehnder optical waveguides, wherein the Mach-Zehnder optical waveguide includes a first optical waveguide and a second optical waveguide, a first upper electrode is provided on the first optical waveguide and a second upper electrode is provided on the second optical waveguide, and an upper layer higher than the first upper electrode and the second upper electrode between the first upper electrode and the second upper electrode includes a metal layer. An electro-optic device is capable of suppressing electrical crosstalk between components and seeking wide frequency band.
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公开(公告)号：US20220317371A1
公开(公告)日：2022-10-06
申请号：US17707608
申请日：2022-03-29
Applicant: TDK CORPORATION
Inventor： Kenji NAGASE , Hiroshi TAKE , Anthony Reymund Melad BINARAO , Cheng Bu HENG
Abstract: A optical device including: a substrate; an optical waveguide formed at the substrate; and a protective layer formed adjacent to the optical waveguide, wherein the optical waveguide includes multiple side surfaces that intersect the substrate, at least one side surface of the optical waveguide is provided with a rough surface. According to the optical device, the light propagation loss can be reduced.
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公开(公告)号：US20240377696A1
公开(公告)日：2024-11-14
申请号：US18293020
申请日：2022-09-28
Applicant: TDK CORPORATION
Inventor： Hiroshi TAKE , Kenji NAGASE , Anthony Reymund Melad BINARAO , Cheng Bu HENG
Abstract: An optical device, including a substrate and a plurality of optical waveguide paths formed on the substrate and having slab portions with different thicknesses.
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