公开(公告)号：US20230069468A1

公开(公告)日：2023-03-02

申请号：US17797213

申请日：2021-01-20

Applicant: TDK Corporation

Inventor： Shinji Iwatsuka ,  Hiroki HARA ,  Anthony Reymund Melad BINARAO ,  Cheng Bu HENG ,  Hiroshi TAKE ,  Kenji NAGASE

IPC: G02F1/035

Abstract: An optical waveguide element includes: an optical waveguide having a ridge part and a slab part having a thickness less than the ridge part. The optical waveguide includes: a first waveguide having a first ridge with and a first slab film thickness; a second waveguide having a second ridge width and a second slab film thickness; a first intermediate waveguide connected to the first waveguide and having a third ridge width and the first slab film thickness; and a second intermediate waveguide connected to the second waveguide and having a fourth ridge width and the second slab film thickness. The first waveguide, the first intermediate waveguide, the second intermediate waveguide, and the second waveguide are arranged in this order; the second slab film thickness is larger than the first slab film thickness; and the third ridge width is larger than the fourth ridge width.

公开(公告)号：US20230036811A1

公开(公告)日：2023-02-02

申请号：US17716440

申请日：2022-04-08

Applicant: TDK CORPORATION

Inventor： Kenji NAGASE ,  Hiroshi TAKE ,  Anthony Reymund Melad BINARAO ,  Cheng Bu HENG

IPC: G02F1/225 ,  G02F1/035 ,  G02F1/21

Abstract: The invention relates to an optical modulator. The optical modulator comprising: a substrate; an electro-optical material layer formed on a predetermined region of the substrate; a buffer layer formed on the substrate which is provided so as to cover the electro-optical material layer; and an electrode formed on the buffer layer, and the electro-optical material layer has a RF portion optical waveguide which is applied with a modulation signal and is patterned, and a DC portion optical waveguide which is applied with a DC voltage and is patterned, the electrode has an RF portion electrode formed on the buffer layer where the RF portion optical waveguide is located and a DC portion electrode formed on the buffer layer where the DC portion optical waveguide is located, the film thickness of the DC portion electrode is smaller than the film thickness of the RF portion electrode. According to the present invention, an optical modulator which can suppress electrical crosstalk caused by the noise signal generated in the DC portion electrode and can improve high-frequency characteristics and achieve a widening of bandwidth of the optical frequency band in the high-frequency signals propagating in the RF portion electrode is provided.

公开(公告)号：US20240329340A1

公开(公告)日：2024-10-03

申请号：US18619829

申请日：2024-03-28

Applicant: TDK CORPORATION

Inventor： Kenji NAGASE ,  Hiroshi TAKE ,  Shuntaro KODAMA ,  Ryohei FUKUZAKI

IPC: G02B6/42

CPC classification number: G02B6/4239

Abstract: An optical device includes: a substrate having a pair of main surfaces opposite each other in a first direction, end surfaces adjacent to the main surfaces, and a pair of side surfaces, and an optical waveguide, disposed along the main surface of the substrate and having a light incidence end or a light exit end in the direction of a plane where the end surface is located, wherein, an adhesive for connection is coated on the end surface of the substrate, and at least one stepped portion is formed between the optical waveguide and the adhesive.

公开(公告)号：US20230314710A1

公开(公告)日：2023-10-05

申请号：US18191050

申请日：2023-03-28

Applicant: TDK CORPORATION

Inventor： Kenji NAGASE ,  Hiroshi TAKE ,  Anthony Reymund Melad BINARAO ,  Cheng Bu HENG

IPC: G02B6/125

CPC classification number: G02B6/125 ,  G02B2006/12097

Abstract: The present invention provides an optical device and an optical modulator, the optical device comprises an optical waveguide, at an surface of plate-like or film-like electro-optic material forming the optical waveguide, 3 locations are selected in the extension direction of the optical waveguide, and 2 locations are selected in the width direction of the optical waveguide in a range of a region of 0.1×0.1 μm, and for a total of 6 locations, an surface roughness RMS is measured with Atomic Force Microscope, and an average of the RMS is 5.1 nm or less. According to the optical device in the present invention, the occurrence of micro-cracks at the optical waveguide can be suppressed, thereby reducing the light propagation loss.

公开(公告)号：US20230124507A1

公开(公告)日：2023-04-20

申请号：US17914610

申请日：2021-03-31

Applicant: TDK CORPORATION

Inventor： Kenji NAGASE ,  Anthony Reymund Melad BINARAO ,  Cheng Bu HENG ,  Hiroshi TAKE

IPC: G02F1/225 ,  G02F1/21 ,  G02F1/035

Abstract: An electro-optical device includes an optical waveguide and an upper electrode provided on the optical waveguide, the optical waveguide is formed by turning back on a plane, the upper electrode has adjacent parts by turning back the optical waveguide, and an upper layer higher than the upper electrode between the adjacent parts includes a metal layer. Alternatively, an electro-optic device includes a plurality of Mach-Zehnder optical waveguides, wherein the Mach-Zehnder optical waveguide includes a first optical waveguide and a second optical waveguide, a first upper electrode is provided on the first optical waveguide and a second upper electrode is provided on the second optical waveguide, and an upper layer higher than the first upper electrode and the second upper electrode between the first upper electrode and the second upper electrode includes a metal layer. An electro-optic device is capable of suppressing electrical crosstalk between components and seeking wide frequency band.

公开(公告)号：US20220317371A1

公开(公告)日：2022-10-06

申请号：US17707608

申请日：2022-03-29

Applicant: TDK CORPORATION

Inventor： Kenji NAGASE ,  Hiroshi TAKE ,  Anthony Reymund Melad BINARAO ,  Cheng Bu HENG

IPC: G02B6/125 ,  G02F1/21

Abstract: A optical device including: a substrate; an optical waveguide formed at the substrate; and a protective layer formed adjacent to the optical waveguide, wherein the optical waveguide includes multiple side surfaces that intersect the substrate, at least one side surface of the optical waveguide is provided with a rough surface. According to the optical device, the light propagation loss can be reduced.

公开(公告)号：US20220326554A1

公开(公告)日：2022-10-13

申请号：US17707117

申请日：2022-03-29

Applicant: TDK CORPORATION

Inventor： Hiroshi TAKE ,  Kenji NAGASE ,  Anthony Reymund Melad BINARAO ,  Cheng Bu HENG

IPC: G02F1/035 ,  G02F1/21 ,  G02F1/225

Abstract: An electro-optical device includes a substrate, an optical waveguide formed on the substrate, a buffer layer formed on the substrate which is provided so as to cover the optical waveguide and an electrode formed on the buffer layer, when viewed in a propagation direction of light, a side surface of the optical waveguide has at least one slope change point. An electro-optical device can reduce the driving voltage and provide the propagation loss of light.

公开(公告)号：US20220317358A1

公开(公告)日：2022-10-06

申请号：US17707055

申请日：2022-03-29

Applicant: TDK CORPORATION

Inventor： Kenji NAGASE ,  Hiroshi TAKE ,  Anthony Reymund Melad BINARAO ,  Cheng Bu HENG

IPC: F21V8/00

Abstract: An optical device including: a substrate; an optical waveguide formed at the substrate; and a protective layer formed adjacent to the optical waveguide, wherein the optical waveguide includes multiple side surfaces that intersect the substrate, at least one side surface of the optical waveguide is provided with a rough surface. According to the optical device of the present invention, the light propagation loss can be reduced.

公开(公告)号：US20240329306A1

公开(公告)日：2024-10-03

申请号：US18620035

申请日：2024-03-28

Applicant: TDK CORPORATION

Inventor： Shuntaro KODAMA ,  Hiroshi TAKE ,  Kenji NAGASE ,  Ryohei FUKUZAKI

IPC: G02B6/122 ,  G02B6/12

CPC classification number: G02B6/122 ,  G02B2006/12097

Abstract: An optical device includes: a substrate having a pair of main surfaces opposite each other in a first direction and an end surface adjacent to the main surface, and an optical waveguide formed on the substrate and having a light incident surface or a light exit surface in a direction of a plane where the end surface is located, where at least a central portion of the light incident surface and/or light exit surface of the optical waveguide includes an inclined surface having a preset angle with respect to the end surface of the substrate.

公开(公告)号：US20230375781A1

公开(公告)日：2023-11-23

申请号：US18028354

申请日：2021-09-29

Applicant: TDK CORPORATION

Inventor： Hiroshi TAKE ,  Kenji NAGASE ,  Anthony Reymund Melad BINARAO ,  Cheng Bu HENG

IPC: G02B6/12

CPC classification number: G02B6/12007 ,  G02B2006/12097

Abstract: An electro-optic device which is provided with: a substrate, an optical waveguide formed on the substrate, and an upper electrode formed on the optical waveguide. The electro-optic device is further provided with a buffer layer formed between the substrate and the upper electrode, and a boundary portion of the optical waveguide and the buffer layer forms an oxide layer different from the optical waveguide and the buffer layer in composition.