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公开(公告)号:US20180248106A1
公开(公告)日:2018-08-30
申请号:US15906292
申请日:2018-02-27
Applicant: TDK CORPORATION
Inventor: Makoto ISHIZAKI , Keisuke TERANISHI , Masashi KITAZAKI , Mingyu CHEN , Kazuki FUKASAWA
IPC: H01L41/187 , C04B35/453 , C04B35/626 , C04B35/634 , C04B35/638 , C04B35/64
CPC classification number: H01L41/1878 , C01G49/009 , C01P2002/52 , C01P2002/54 , C01P2006/40 , C04B35/26 , C04B35/453 , C04B35/6261 , C04B35/62695 , C04B35/63416 , C04B35/638 , C04B35/64 , C04B2235/3215 , C04B2235/3222 , C04B2235/3236 , C04B2235/3274 , C04B2235/3298 , C04B2235/604 , C04B2235/6567 , C04B2235/768 , H01L41/43
Abstract: The piezoelectric composition is represented by the following Chemical Formula (1): x[BimFeO3]-y[BamTiO3]-z[BimAlO3] (1) wherein 0.5≤x≤0.7995, 0.2≤y≤0.4, 0.0005≤z≤0.1, x+y+z=1, 0.96≤m≤1.04.