公开(公告)号：US09231182B2

公开(公告)日：2016-01-05

申请号：US14718645

申请日：2015-05-21

Applicant: TDK CORPORATION

Inventor： Hirofumi Natori ,  Kenichi Tochi ,  Akihiro Unno ,  Takashi Aoyagi

IPC: H01L41/047 ,  G01C19/5607

CPC classification number: H01L41/047 ,  G01C19/56 ,  G01C19/5607

Abstract: In a piezoelectric element, a piezoelectric film, a first electrode film provided on one surface of the piezoelectric film, and a second electrode film provided on the other surface of the piezoelectric film form a layered structure, an outer contour of the first electrode film and an outer contour of the second electrode film are positioned outside an outer contour of the piezoelectric film as viewed in a layering direction, an organic resin film is in contact with the piezoelectric film, and generation of noise is suppressed.

Abstract translation: 在压电元件中，压电膜，设置在压电膜的一个表面上的第一电极膜和设置在压电膜的另一个表面上的第二电极膜形成层状结构，第一电极膜的外轮廓和 第二电极膜的外轮廓位于压电膜的外轮廓外侧，从分层方向观察，有机树脂膜与压电膜接触，抑制噪声的产生。