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公开(公告)号：US20210103165A1
公开(公告)日：2021-04-08
申请号：US16832647
申请日：2020-03-27
Applicant: TDK Corporation , FUJITSU OPTICAL COMPONENTS LIMITED
Inventor： Shinji IWATSUKA , Kenji SASAKI , Hiroki HARA , Yasuhiro OHMORI , Masaharu DOI , Shintaro TAKEUCHI , Yoshihiko YOSHIDA , Yoshinobu KUBOTA
Abstract: An electro-optic device is provided with a substrate, an optical waveguide formed of a lithium niobate film with a ridge shape on the substrate, and an electrode that applies an electric field to the optical waveguide. The optical waveguide includes a modulation waveguide provided in an electric field application region applied with the electric field and having a thickness of 1 μm or larger and a bent waveguide provided in a region other than the electric field application region and having a curvature radius of 16 μm or larger and 80 μm or smaller.
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公开(公告)号：US20200310170A1
公开(公告)日：2020-10-01
申请号：US16651633
申请日：2018-09-28
Applicant: TDK Corporation
Inventor： Shinji IWATSUKA , Makoto ENDO , Kenji SASAKI
IPC: G02F1/035
Abstract: An optical modulator includes: a substrate; a waveguide layer including first and second optical waveguides formed of an electro-optic material film on the substrate to have a ridge shape and to be disposed adjacent to each other; an RF part that applies a modulated signal to the optical waveguides; and a DC part that applies a DC bias to the optical waveguides. The DC part includes: a buffer layer covering at least upper surfaces of the optical waveguides; a first bias electrode opposed to the first optical waveguide through the buffer layer; and a second bias electrode provided adjacent to the first bias electrode. A first DC bias voltage is applied between the first and second bias electrodes. A waveguide layer removal area in which at least part of the waveguide layer is removed is provided at least under an area between the first and second bias electrodes.
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公开(公告)号：US20250130448A1
公开(公告)日：2025-04-24
申请号：US18918185
申请日：2024-10-17
Applicant: TDK CORPORATION
Inventor： Kenji SASAKI , Takashi KIKUKAWA , Shusaku UMEMOTO
IPC: G02F1/035
Abstract: An electro-optical component includes: a single crystal substrate; an optical waveguide comprising a dielectric thin film formed in contact with the main surface of the single crystal substrate; and an electrode configured to apply voltage to the optical waveguide, wherein the dielectric thin film is made of a lithium niobate film that is an epitaxial film with a c-axis orientation, and an X-ray intensity ratio (LiNb3O8(60−2)/LiNbO3(006)) of LiNb3O8 to LiNbO3 is 0.02 or more.
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4.发明申请公开(公告)号：US20250129516A1
公开(公告)日：2025-04-24
申请号：US18919683
申请日：2024-10-18
Applicant: TDK Corporation
Inventor： Shusaku UMEMOTO , Kenji SASAKI , Takashi KIKUKAWA
Abstract: A substrate with a dielectric thin film includes: a single crystal substrate; and a dielectric thin film formed in contact with a main surface of the single crystal substrate, wherein the dielectric thin film has a thickness of 0.5 μm to 2 μm and is made of a lithium niobate film that is an epitaxial film with a c-axis orientation, the dielectric thin film has a twin crystal structure of LiNbO3 of a first crystal and a second crystal corresponding to a crystal in which the first crystal is rotated 180° around the c-axis, the first crystal and the second crystal in an upper region of the dielectric thin film, excluding a lower region from the single crystal substrate to half of a thickness direction in the dielectric film, have maximum domain widths of 80 nm to 300 nm.
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公开(公告)号：US20200218126A1
公开(公告)日：2020-07-09
申请号：US16641225
申请日：2018-07-31
Applicant: TDK Corporation
Inventor： Shinji IWATSUKA , Makoto ENDO , Kenji SASAKI
Abstract: An optical modulator includes: first and second optical waveguides formed of an electro-optic material film on a substrate so as to have a ridge shape and to be disposed adjacent to each other; a buffer layer covering at least the upper surfaces of the first and second optical waveguides; and first and second signal electrodes provided above the buffer layer. The first and second signal electrodes have, respectively, first and second lower layer parts opposite, respectively, to the first and second optical waveguides through the buffer layer; and first and second upper layer parts provided, respectively, above the first and second lower layer parts. Widths of the lower surfaces of the first and second lower layer parts are smaller than widths of the first and second upper layer parts.
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Patent Agency Ranking
公开(公告)号：US20190271897A1
公开(公告)日：2019-09-05
申请号：US16410926
申请日：2019-05-13
Applicant: TDK Corporation
Inventor： Shinji IWATSUKA , Kenji SASAKI , Satoshi SHIRAI
Abstract: Disclosed herein is an optical waveguide element that includes a substrate and a waveguide layer formed on the substrate and comprising lithium niobate. The waveguide layer has a slab part having a predetermined thickness and a ridge part protruding from the slab part. The maximum thickness of the slab part is 0.05 times or more and less than 0.4 times a wavelength of a light propagating in the ridge part.
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公开(公告)号：US20250130449A1
公开(公告)日：2025-04-24
申请号：US18918299
申请日：2024-10-17
Applicant: TDK CORPORATION
Inventor： Kenji SASAKI , Takashi KIKUKAWA , Shusaku UMEMOTO
Abstract: An electro-optical component includes: a single crystal substrate; an optical waveguide made of a dielectric thin film formed in contact with a main surface of the single crystal substrate; and an electrode configured to apply voltage to the optical waveguide, wherein the dielectric thin film is made of a lithium niobate film that is an epitaxial film with a c-axis orientation, and a c-axis length of the lithium niobate film is 13.88 Å or more.
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公开(公告)号：US20190146302A1
公开(公告)日：2019-05-16
申请号：US16095116
申请日：2017-04-07
Applicant: TDK CORPORATION
Inventor： Shinji IWATSUKA , Kenji SASAKI
IPC: G02F1/225
CPC classification number: G02F1/225 , G02F1/035 , G02F2001/212 , G02F2202/20
Abstract: A single drive type optical modulator has good high-frequency characteristics and reduced wavelength chirp of the modulated light. An optical modulator is provided with a Mach-Zehnder optical waveguide including first and second optical waveguides, a buffer layer covering the first and second optical waveguides, and an electrode layer including first and second ground electrodes and a signal electrode positioned between the first and second ground electrodes in a plan view. The signal electrode has a first lower surface covering the first optical waveguide through the buffer layer, the first ground electrode has a first lower surface covering the second optical waveguide through the buffer layer and a second lower surface positioned above the first lower surface, and a gap between the signal electrode and the second ground electrode that is larger than a gap between the signal electrode and the first ground electrode.
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9.发明申请公开(公告)号：US20250028194A1
公开(公告)日：2025-01-23
申请号：US18736684
申请日：2024-06-07
Applicant: TDK CORPORATION
Inventor： Shusaku UMEMOTO , Kenji SASAKI , Takashi KIKUKAWA
IPC: G02F1/035
Abstract: A substrate with a dielectric thin film 1 includes a single-crystal substrate, a stress relaxation layer, and a dielectric thin film, in which the stress relaxation layer is made of a c-axis-oriented epitaxial film, and includes a twin crystal structure of LiNbO3 including a first and a second crystal existing at a position obtained by rotating the first crystal 180° about a c-axis and a LiNb3O8 phase, the dielectric thin film is made of a lithium niobate film which is a c-axis-oriented epitaxial film, has the twin crystal structure of LiNbO3, has a film thickness of 0.5 μm to 2 μm, and has a maximum domain width greater than a maximum domain width of the stress relaxation layer, and a percentage of a film thickness of the stress relaxation layer to the film thickness of the dielectric thin film is 5% to 25%.
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公开(公告)号：US20200310216A1
公开(公告)日：2020-10-01
申请号：US16832784
申请日：2020-03-27
Applicant: TDK Corporation , FUJITSU OPTICAL COMPONENTS LIMITED
Inventor： Shinji IWATSUKA , Kenji SASAKI , Hiroki HARA , Yasuhiro OHMORI , Masaharu DOI , Shintaro TAKEUCHI , Yoshihiko YOSHIDA , Yoshinobu KUBOTA
Abstract: An electro-optic device is provided with a substrate, an optical waveguide formed of a lithium niobate film with a ridge shape on the substrate, and an electrode that applies an electric field to the optical waveguide. The optical waveguide includes a first waveguide section provided at least in an electric field application region applied with the electric field and having a thickness of 1 μm or larger and a second waveguide section provided in a region other than the electric field application region and having a thickness of 0.3 μm or larger and less than 1 μm.
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