ROOT MEAN SQUARE SENSOR DEVICE
    1.
    发明申请

    公开(公告)号:US20220009767A1

    公开(公告)日:2022-01-13

    申请号:US17487203

    申请日:2021-09-28

    Abstract: A sensor device includes a first and second Micro-Electro-Mechanical (MEM) structures. The first MEM structure includes a first heating element on a first layer of the first MEM structure. The first heating element includes an input adapted to receive an input signal. The first MEM structure also includes a first temperature sensing element on a second layer of the first MEM structure. The second MEM structure includes a second heating element on a first layer of the second MEM structure and a second temperature sensing element on a second layer of the second MEM structure. An output circuit has a first input coupled to the first temperature sensing element and a second input coupled to the second temperature sensing element.

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