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1.发明授权Soft mechanical stops to limit over-travel of proof masses in cantilevered piezoelectric devices 有权柔性机械停止以限制悬臂式压电装置中检验质量的超行程公开(公告)号：US09054294B2
公开(公告)日：2015-06-09
申请号：US13647279
申请日：2012-10-08
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Bradley M. Haskett
IPC: H01L41/08 , H01L41/053 , H01L41/113
CPC classification number: H01L41/053 , H01L41/1136
Abstract: A piezoelectric device is disclosed which has a built-in soft stop which serves for protection against excessive force.
Abstract translation: 公开了一种具有内置软止动件的压电装置，其用于防止过度的力。
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公开(公告)号：US20150205098A1
公开(公告)日：2015-07-23
申请号：US14672929
申请日：2015-03-30
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Wei-Yan Shih , Bradley M. Haskett
CPC classification number: G02B27/0006 , B29D11/0074 , B81B7/0077 , C03C17/22 , C03C17/23 , C03C27/02 , G02B26/0833 , Y10T29/49789 , Y10T29/49792
Abstract: Disclosed embodiments demonstrate batch processing methods for producing optical windows for microdevices. The windows protect the active elements of the microdevice from contaminants, while allowing light to pass into and out of the hermetically sealed microdevice package. Windows may be batch produced, reducing the cost of production, by fusing multiple metal frames to a single sheet of glass. In order to allow windows to be welded atop packages, disclosed embodiments keep a lip of metal without any glass after the metal frames are fused to the sheet of glass. Several techniques may accomplish this goal, including grinding grooves in the glass to provide a gap that prevents fusion of the glass to the metal frames along the outside edges in order to form a lip. The disclosed batch processing techniques may allow for more efficient window production, taking advantage of the economy of scale.
Abstract translation: 公开的实施例示出了用于生产微型设备的光学窗口的批处理方法。 窗户保护微型设备的有源元件免受污染物的影响，同时允许光线进入和离开密封的微型设备包装。 Windows可以批量生产，通过将多个金属框架融合到单张玻璃板来降低生产成本。 为了允许将窗口焊接在封装的顶部，所公开的实施例在金属框架熔合到玻璃板之后保持没有任何玻璃的金属的唇缘。 几种技术可以实现这一目标，包括在玻璃中的研磨槽以提供间隙，以防止玻璃与外部边缘的金属框架熔合以形成唇缘。 公开的批量处理技术可以利用规模经济的优势来允许更有效的窗口生产。
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3.发明申请SOFT MECHANICAL STOPS TO LIMIT OVER-TRAVEL OF PROOF MASSES IN CANTILEVERED PIEZOELECTRIC DEVICES 有权柔性机械压力限制超声波压电装置中的过载质量公开(公告)号：US20130088123A1
公开(公告)日：2013-04-11
申请号：US13647279
申请日：2012-10-08
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Bradley M. Haskett
IPC: H02N2/00
CPC classification number: H01L41/053 , H01L41/1136
Abstract: A piezoelectric device is disclosed which has a built-in soft stop which serves for protection against excessive force.
Abstract translation: 公开了一种具有内置软止动件的压电装置，其用于防止过度的力。
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公开(公告)号：US09411159B2
公开(公告)日：2016-08-09
申请号：US14672929
申请日：2015-03-30
Applicant: Texas Instruments Incorporated
Inventor： Wei-Yan Shih , Bradley M. Haskett
CPC classification number: G02B27/0006 , B29D11/0074 , B81B7/0077 , C03C17/22 , C03C17/23 , C03C27/02 , G02B26/0833 , Y10T29/49789 , Y10T29/49792
Abstract: Disclosed embodiments demonstrate batch processing methods for producing optical windows for microdevices. The windows protect the active elements of the microdevice from contaminants, while allowing light to pass into and out of the hermetically sealed microdevice package. Windows may be batch produced, reducing the cost of production, by fusing multiple metal frames to a single sheet of glass. In order to allow windows to be welded atop packages, disclosed embodiments keep a lip of metal without any glass after the metal frames are fused to the sheet of glass. Several techniques may accomplish this goal, including grinding grooves in the glass to provide a gap that prevents fusion of the glass to the metal frames along the outside edges in order to form a lip. The disclosed batch processing techniques may allow for more efficient window production, taking advantage of the economy of scale.
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