公开(公告)号：US20230137953A1

公开(公告)日：2023-05-04

申请号：US17515113

申请日：2021-10-29

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Jeronimo SEGOVIA-FERNANDEZ ,  Corina NISTORICA

IPC: G02B1/00 ,  H01L41/113 ,  H01L41/047 ,  H01L41/083 ,  H01L41/18

Abstract: An optical detector system includes a light source configured to emit light having a frequency spectrum and modulated in time, and an optical detector configured to detect an intensity of the light at a wavelength range within the frequency spectrum. The optical detector includes a piezoelectric layer, a first metal layer coupled to a first surface of the piezoelectric layer, a second metal layer coupled to a second surface of the piezoelectric layer, and a plasmonic metasurface coupled to the first metal layer and configured to absorb the light at the wavelength range, the plasmonic metasurface including metal structures and a dielectric layer disposed on the first metal layer. The optical detector system further includes a voltage detector coupled to the first metal layer and the second metal layer, the voltage detector configured to detect a voltage at a frequency of the modulated light.