公开(公告)号：US20140370249A1

公开(公告)日：2014-12-18

申请号：US14373505

申请日：2013-01-16

Applicant: TOCALO CO., LTD.

Inventor： Yoshio Harada ,  Takema Teratani ,  Shinya Miki ,  Kenichiro Togoe

IPC: C23C14/48

CPC classification number: C23C14/48 ,  C23C4/04 ,  C23C4/18 ,  Y10T428/24802

Abstract: This invention is to provide a fluoride spray coating covered member having excellent resistance to halogen corrosion and resistance to plasma erosion and displaying identification symbols such as letters, numeric characters, graphic, pattern, firm name, serial number and so on. In the invention, one or more implanting gases selected from fluorine-containing gas, oxygen gas and inert gas are ion-implanted onto a white fluoride spray coating formed on a surface of a substrate, whereby at least a part of the surface of the white fluoride spray coating is changed into a black color to form a black ion-implanted layer.

Abstract translation: 本发明提供一种具有优异的抗卤素腐蚀性和耐等离子体侵蚀性的氟喷涂层覆盖部件，并显示字母，数字，图形，图案，公司名称，序列号等识别符号。 在本发明中，将选自含氟气体，氧气和惰性气体的一种或多种注入气体离子注入到形成在基材表面上的白色氟化物喷涂层上，由此白色表面的至少一部分 氟化物喷涂改为黑色，形成黑色离子注入层。

公开(公告)号：US09238863B2

公开(公告)日：2016-01-19

申请号：US14373505

申请日：2013-01-16

Applicant: TOCALO CO., LTD.

Inventor： Yoshio Harada ,  Takema Teratani ,  Shinya Miki ,  Kenichiro Togoe

IPC: B32B3/00 ,  C23C14/48 ,  C23C4/04 ,  C23C4/18

CPC classification number: C23C14/48 ,  C23C4/04 ,  C23C4/18 ,  Y10T428/24802

Abstract: This invention is to provide a fluoride spray coating covered member having excellent resistance to halogen corrosion and resistance to plasma erosion and displaying identification symbols such as letters, numeric characters, graphic, pattern, firm name, serial number and so on. In the invention, one or more implanting gases selected from fluorine-containing gas, oxygen gas and inert gas are ion-implanted onto a white fluoride spray coating formed on a surface of a substrate, whereby at least a part of the surface of the white fluoride spray coating is changed into a black color to form a black ion-implanted layer.

Abstract translation: 本发明提供一种具有优异的抗卤素腐蚀性和耐等离子体侵蚀性的氟喷涂层覆盖部件，并显示字母，数字，图形，图案，公司名称，序列号等识别符号。 在本发明中，将选自含氟气体，氧气和惰性气体的一种或多种注入气体离子注入到形成在基材表面上的白色氟化物喷涂层上，由此白色表面的至少一部分 氟化物喷涂改为黑色，形成黑色离子注入层。