公开(公告)号：US20200056724A1

公开(公告)日：2020-02-20

申请号：US16538228

申请日：2019-08-12

Applicant: TOKYO ELECTRON LIMITED

Inventor： Tomohisa KIMOTO ,  Yuichi FURUYA ,  Takashi KAKEGAWA ,  Eiichi KOMORI ,  Hideaki FUJITA ,  Hiroyuki MORI

IPC: F16K49/00 ,  H01L21/67

Abstract: A valve device includes: valves configured to control a flow of processing gases supplied to a process vessel; a housing in which first flow paths through which the processing gases flow are formed; a heat diffuser configured to cover the housing and diffuse heat of the housing; a heating part configured to cover the housing covered with the heat diffuser and heat the housing via the heat diffuser; a supply configured to supply a coolant to a second flow path formed between the housing and the heat diffuser; and a controller configure to control the heating part to heat the housing to a first temperature when a predetermined process is performed on a target substrate, and before a start of a cleaning process of the process vessel, control the heating part to stop heating of the housing and control the supply to supply the coolant to the second flow path.

公开(公告)号：US20190180988A1

公开(公告)日：2019-06-13

申请号：US16211055

申请日：2018-12-05

Applicant: TOKYO ELECTRON LIMITED

Inventor： Yuichi FURUYA ,  Hiroyuki MORI ,  Einosuke TSUDA ,  Eiichi KOMORI ,  Tomohisa KIMOTO

IPC: H01J37/32

Abstract: A source material container includes a housing, a tray assembly and a plurality of cylindrical members. The housing provides a carrier gas introduction port and an opening through which a gas containing source material vapor is outputted. The tray assembly trays stacked in the housing. The cylindrical members are arranged in a radial direction between the tray assembly and the housing. The outermost cylindrical member provides a slit and each of the other cylindrical members than the outermost cylindrical member provides a plurality of slits. From the introduction port to the gap between the tray assembly and the innermost cylindrical member, the flow path of the carrier gas is branched in a stepwise manner in the height direction.