公开(公告)号：US20210217649A1

公开(公告)日：2021-07-15

申请号：US17145171

申请日：2021-01-08

Applicant: TOKYO ELECTRON LIMITED

Inventor： Kazuhiko AKAHANE ,  Toshiya TSUKAHARA ,  Sungjae LEE ,  Namho YUN ,  Jisoo SUH

IPC: H01L21/687 ,  H01L21/67 ,  H01J37/32

Abstract: An edge ring is disposed to surround a target substrate. The edge ring includes a first upper surface made of silicon carbide, tungsten carbide, magnesium oxide, or yttria, and a second upper surface made of silicon. The second upper surface is formed at a position lower than the first upper surface to face a bottom surface of a peripheral portion of the target substrate.