公开(公告)号：US20190057843A1

公开(公告)日：2019-02-21

申请号：US15999001

申请日：2018-08-20

Applicant: TOKYO ELECTRON LIMITED

Inventor： Kazushi Kaneko ,  Kazunori Funazaki ,  Koji Itadani ,  Kensuke Fukata ,  Kouki Uchida

IPC: H01J37/32 ,  H03L5/02 ,  H05H1/46

Abstract: An apparatus includes a chamber main body, a microwave output device that generates a microwave having a bandwidth, a wave guide tube that is connected between the microwave output device and the chamber main body, and tuner that is provided in the wave guide tube. The microwave output device generates a microwave of which power is pulse-modulated to have a high level and a low level. The tuner includes a stub configured to be adjusted a protrusion amount with respect to an internal space of the wave guide tube, a tuner wave detection unit that detects a measured value corresponding to power of a microwave in the wave guide tube at a timing based on the pulse frequency and the setting duty ratio, and a tuner control unit that adjusts a protrusion amount of the stub on the basis of the measured value detected by the tuner wave detection unit.