Plasma processing apparatus
    2.
    发明申请

    公开(公告)号:US20190057843A1

    公开(公告)日:2019-02-21

    申请号:US15999001

    申请日:2018-08-20

    IPC分类号: H01J37/32 H03L5/02 H05H1/46

    摘要: An apparatus includes a chamber main body, a microwave output device that generates a microwave having a bandwidth, a wave guide tube that is connected between the microwave output device and the chamber main body, and tuner that is provided in the wave guide tube. The microwave output device generates a microwave of which power is pulse-modulated to have a high level and a low level. The tuner includes a stub configured to be adjusted a protrusion amount with respect to an internal space of the wave guide tube, a tuner wave detection unit that detects a measured value corresponding to power of a microwave in the wave guide tube at a timing based on the pulse frequency and the setting duty ratio, and a tuner control unit that adjusts a protrusion amount of the stub on the basis of the measured value detected by the tuner wave detection unit.

    SYSTEM AND METHOD OF AUTOMATIC POWER CONTROL SYSTEM AND BIAS CURRENT CONTROL CIRCUIT

    公开(公告)号:US20170366189A1

    公开(公告)日:2017-12-21

    申请号:US15338671

    申请日:2016-10-31

    发明人: Yongqi ZHOU

    IPC分类号: H03L5/02 H03B5/32 G05F1/56

    摘要: A bias-current-control circuit is provided. The bias-current-control circuit includes a transconductance circuit, a constant-current source, and a current-mirror circuit. The transconductance circuit is connected to a node and detects a voltage signal to generate a first current. The constant-current source is connected to the node and generates a tail current. The current-mirror circuit includes a reference current terminal and a bias current terminal, and the reference current terminal is coupled to the node. A second current which flows through the reference current terminal is determined by a current difference between the tail current and the first current. A bias current which flows through the bias current terminal is generated based on the second current. Furthermore, the second current and the bias current are in a predetermined ratio.

    Peak detectors for amplitude control of oscillators
    8.
    发明授权
    Peak detectors for amplitude control of oscillators 有权
    用于振荡器幅度控制的峰值检测器

    公开(公告)号:US09473150B2

    公开(公告)日:2016-10-18

    申请号:US14087993

    申请日:2013-11-22

    发明人: Aaron J. Caffee

    IPC分类号: H03L5/00 H03L5/02

    CPC分类号: H03L5/00 H03L5/02

    摘要: Various techniques for automatic amplitude control of an oscillator are described. An apparatus includes an oscillator circuit configured to generate an oscillating signal. The apparatus includes a feedback circuit configured to control a bias signal of the oscillator circuit to maintain a target peak amplitude of the oscillating signal based on a current-mode indicator of a peak amplitude of the oscillating signal and a reference current. The feedback loop includes a rectifier circuit configured to generate the current-mode indicator and a summing node configured to provide a bias control signal based on a difference between the current-mode indicator and the reference current. The feedback circuit may include a capacitor coupled to the summing node and configured to accumulate charge according to the difference. A magnitude of the current-mode indicator may be at least two orders of magnitude less than a magnitude of the current through an output node of the oscillator circuit.

    摘要翻译: 描述了用于振荡器的自动幅度控制的各种技术。 一种装置包括被配置为产生振荡信号的振荡器电路。 该装置包括反馈电路,其被配置为基于振荡信号的峰值幅度和参考电流的电流模式指示来控制振荡器电路的偏置信号,以维持振荡信号的目标峰值振幅。 反馈回路包括被配置为产生电流模式指示器的整流电路和被配置为基于电流模式指示器和参考电流之间的差提供偏置控制信号的求和节点。 反馈电路可以包括耦合到求和节点的电容器,并且被配置成根据该差异累加电荷。 电流模式指示器的幅度可以比通过振荡器电路的输出节点的电流的幅度小至少两个数量级。

    Oscillator, oscillating method, image sensor, and imaging apparatus
    9.
    发明授权
    Oscillator, oscillating method, image sensor, and imaging apparatus 有权
    振荡器,振荡方法,图像传感器和成像装置

    公开(公告)号:US09083352B2

    公开(公告)日:2015-07-14

    申请号:US13828545

    申请日:2013-03-14

    申请人: Sony Corporation

    摘要: An oscillator includes: inverters that are connected in a loop shape and of which the number is an odd number greater than or equal to three; and a delay section that delays change in a voltage which is input to one inverter of the odd number of inverters. The one inverter is a schmitt trigger inverter. The schmitt trigger inverter includes a current source, and a resistor in which current supplied by the current source flows. A hysteresis width of the schmitt trigger inverter depends on the current which flows in the resistor.

    摘要翻译: 振荡器包括:以循环形状连接并且其数量大于或等于3的奇数的反相器; 以及延迟部,其延迟输入到奇数个逆变器的一个逆变器的电压的变化。 一个逆变器是施密特触发逆变器。 施密特触发器逆变器包括电流源和由电流源提供的电流流动的电阻器。 施密特触发器的迟滞宽度取决于电阻中流过的电流。

    Multi-power mode reference clock with constant duty cycle
    10.
    发明授权
    Multi-power mode reference clock with constant duty cycle 有权
    具有恒定占空比的多功率模式参考时钟

    公开(公告)号:US08975976B2

    公开(公告)日:2015-03-10

    申请号:US13787230

    申请日:2013-03-06

    IPC分类号: H03L5/02

    CPC分类号: H03L5/02 H03L1/00

    摘要: A power management apparatus and method for maintaining a substantially constant duty cycle of a reference clock signal in a multi-power oscillator, includes a first output power transistor in electrical parallel with a series arrangement of a second output power transistor and a switch, and a crystal oscillator capacitively coupled to a common gate of the first and second output power transistors, wherein a level of the reference clock signal power output is a normal power level when the switch is open and the level of the reference clock signal power output is a higher power level when the switch is closed to operate the second output power transistor in parallel with the first output power transistor.

    摘要翻译: 一种用于在多功率振荡器中保持基准时钟信号的基本恒定的占空比的电源管理装置和方法包括与第二输出功率晶体管和开关的串联装置电并联的第一输出功率晶体管,以及 电容耦合到第一和第二输出功率晶体管的公共栅极的晶体振荡器,其中当开关断开时,参考时钟信号功率输出的电平是正常功率电平,并且参考时钟信号功率输出的电平更高 当开关闭合以与第一输出功率晶体管并联操作第二输出功率晶体管时的功率电平。