公开(公告)号：US20240139780A1

公开(公告)日：2024-05-02

申请号：US18496824

申请日：2023-10-27

Applicant: TOKYO ELECTRON LIMITED

Inventor： Kento KURUSU ,  Akihiro KUBO ,  Noboru NAKASHIMA ,  Yasunari KASAI

IPC: B08B1/00 ,  B08B1/02 ,  B24B7/07

CPC classification number: B08B1/001 ,  B08B1/02 ,  B24B7/07

Abstract: A substrate cleaning member includes: a first member including a first contact surface, wherein the first member is configured to clean or polish a main surface of a substrate by moving the first contact surface along the main surface while the first contact surface is in contact with the main surface; a second member including a second contact surface, wherein the second member is configured to clean the main surface by moving the second contact surface along the main surface while the second contact surface is in contact with the main surface; a lower-layer member configured to support the second member such that the second contact surface protrudes beyond the first contact surface in an axial direction in which the predetermined axis extends; and a base configured to support the first member, the second member and the lower-layer member.