公开(公告)号：US20030025495A1

公开(公告)日：2003-02-06

申请号：US10259605

申请日：2002-09-30

Applicant: TOKYO ELECTRON LTD.

Inventor： Shinji Ilno ,  Haruhiko Yoshioka

IPC: G01R001/00

CPC classification number: G01R31/2887 ,  G01R31/2886

Abstract: A prober of this invention includes a probe card, a main chuck, a shaft member fixed on and extending downwardly from the main chuck, an X table and Y table for retaining the shaft member by use of a guide to be freely movable in a vertical direction, and a contact body fixed on the shaft member. The undersurface of the contact body is made parallel to the mounting surface of the main chuck. The prober further includes an elevation body whose center coincides with an extension line downwardly extending from the test center of the probe card, and an elevation body elevating mechanism for vertically moving the elevation body and a ball provided on the upper portion of the elevation body is slidably set in contact with the undersurface of the contact body.

Abstract translation: 本发明的探测器包括探针卡，主卡盘，固定在主卡盘上并从主卡盘向下延伸的轴构件，X台和Y台，用于通过引导件将轴构件保持在垂直方向上可自由移动 方向和固定在轴构件上的接触体。 接触体的下表面与主卡盘的安装面平行。 探测器还包括一个仰角体，其中心与从探针卡的测试中心向下延伸的延伸线重合，并且用于垂直移动仰角体的升降体升降机构和设置在仰角上部的球体 可滑动地设置成与接触体的下表面接触。