公开(公告)号：US3872377A

公开(公告)日：1975-03-18

申请号：US29653172

申请日：1972-10-11

Applicant: TOKYO SHIBAURA ELECTRIC CO

Inventor： KAGEYAMA KATSUHIRO ,  UTSUNOMIYA SHINHACHI

IPC: H01J41/06 ,  G01N27/62

CPC classification number: H01J41/06

Abstract: A cold cathode ionization gauge is disclosed and includes means for establishing a temporary high electric field and a magnetic field between an anode and a cathode thereof. The temporary application of a high electric field enables a high accuracy vacuum measurement to be made.

Abstract translation: 公开了一种冷阴极电离计，并且包括用于在其阳极和阴极之间建立临时高电场和磁场的装置。 临时应用高电场能够进行高精度的真空测量。