公开(公告)号：US20250144661A1

公开(公告)日：2025-05-08

申请号：US19014658

申请日：2025-01-09

Applicant: TORAY ENGINEERING CO., LTD.

Inventor： Takayuki MIYOSHI ,  Toshiaki IKADA ,  Toshifumi ITO

IPC: B05C5/00 ,  B05C5/02 ,  F26B21/12

Abstract: A coating device comprises a stage, a coater and a dryer. A substrate is configured to be placed on the stage. The coater is configured to eject a coating liquid from a nozzle to form a coating film on the substrate that is placed on the stage while moving relative to the substrate. The dryer is configured to dry the coating film on the substrate. Drying promotion force of the dryer for promoting drying is adjusted on the basis of drying distribution information of the coating film on the substrate in accordance with a region of the coating film.