公开(公告)号：US20250144661A1

公开(公告)日：2025-05-08

申请号：US19014658

申请日：2025-01-09

Applicant: TORAY ENGINEERING CO., LTD.

Inventor： Takayuki MIYOSHI ,  Toshiaki IKADA ,  Toshifumi ITO

IPC: B05C5/00 ,  B05C5/02 ,  F26B21/12

Abstract: A coating device comprises a stage, a coater and a dryer. A substrate is configured to be placed on the stage. The coater is configured to eject a coating liquid from a nozzle to form a coating film on the substrate that is placed on the stage while moving relative to the substrate. The dryer is configured to dry the coating film on the substrate. Drying promotion force of the dryer for promoting drying is adjusted on the basis of drying distribution information of the coating film on the substrate in accordance with a region of the coating film.

公开(公告)号：US20240100558A1

公开(公告)日：2024-03-28

申请号：US18473395

申请日：2023-09-25

Applicant: TORAY ENGINEERING CO., LTD.

Inventor： Kenji HAMAKAWA ,  Hisayoshi TAJIMA ,  Toshifumi ITO

IPC: B05C9/12 ,  B05D3/04

CPC classification number: B05C9/12 ,  B05D3/0453 ,  F26B17/00

Abstract: A coating device is provided with a stage on which a substrate is configured to be placed, an applicator movably arranged relative to the substrate placed on the stage and configured to discharge a coating liquid from a nozzle to form a coating film on the substrate, and a dryer having an air supply port with at least one porous member. The dryer is configured to dry the coating film formed on the substrate by the applicator by supplying air to the coating film from the air supply port. The at least one porous member is configured and arranged to suppress formation of local variations in an amount of air supplied from the air supply port.