公开(公告)号：US20140340813A1

公开(公告)日：2014-11-20

申请号：US14344736

申请日：2012-09-27

Applicant: TOTO LTD.

Inventor： Kazuki Anada ,  Kaduko Ishikawa ,  Yuichi Yoshii ,  Junji Yonezawa

IPC: H01L21/683

CPC classification number: H01L21/6833 ,  H01L21/6875 ,  H02N13/00

Abstract: According to an aspect of an embodiment of the invention, there is provided an AC-driven electrostatic chuck including: a dielectric substrate including protrusions formed on a major surface on a side of mounting a clamped object, and a bottom surface part formed around the protrusions; and an electrode provided on the dielectric substrate, the electrode including a plurality of electrode elements spaced from each other, the plurality of electrode elements being enabled to be applied with an AC voltage of mutually different phases, respectively, and the protrusions being arranged on the major surface with a prescribed spacing depending on shape of the plurality of electrode elements. The AC-driven electrostatic chuck is capable of suppressing local damage to part of the protrusions provided on the mounting surface side.

Abstract translation: 根据本发明的实施例的一个方面，提供了一种AC驱动的静电卡盘，包括：介质基板，包括形成在安装被夹持物体的一侧上的主表面上的突起，以及形成在突起 ; 以及设置在所述电介质基板上的电极，所述电极包括彼此间隔开的多个电极元件，所述多个电极元件能够分别施加相互不同相的交流电压，并且所述突起布置在 主表面具有取决于多个电极元件的形状的规定间隔。 AC驱动的静电卡盘能够抑制设置在安装表面侧的部分突起的局部损坏。

公开(公告)号：US09093488B2

公开(公告)日：2015-07-28

申请号：US14344736

申请日：2012-09-27

Applicant: TOTO LTD.

Inventor： Kazuki Anada ,  Kaduko Ishikawa ,  Yuichi Yoshii ,  Junji Yonezawa

IPC: H02N13/00 ,  H01L21/683 ,  H01L21/687

CPC classification number: H01L21/6833 ,  H01L21/6875 ,  H02N13/00

Abstract: According to an aspect of an embodiment of the invention, there is provided an AC-driven electrostatic chuck including: a dielectric substrate including protrusions formed on a major surface on a side of mounting a clamped object, and a bottom surface part formed around the protrusions; and an electrode provided on the dielectric substrate, the electrode including a plurality of electrode elements spaced from each other, the plurality of electrode elements being enabled to be applied with an AC voltage of mutually different phases, respectively, and the protrusions being arranged on the major surface with a prescribed spacing depending on shape of the plurality of electrode elements. The AC-driven electrostatic chuck is capable of suppressing local damage to part of the protrusions provided on the mounting surface side.

Abstract translation: 根据本发明的实施例的一个方面，提供了一种AC驱动的静电卡盘，包括：介质基板，包括形成在安装被夹持物体的一侧上的主表面上的突起，以及形成在突起 ; 以及设置在所述电介质基板上的电极，所述电极包括彼此间隔开的多个电极元件，所述多个电极元件能够分别施加相互不同相的交流电压，并且所述突起布置在 主表面具有取决于多个电极元件的形状的规定间隔。 AC驱动的静电卡盘能够抑制设置在安装表面侧的部分突起的局部损坏。