公开(公告)号：US10714373B2

公开(公告)日：2020-07-14

申请号：US15788132

申请日：2017-10-19

Applicant: TOTO LTD.

Inventor： Kazuki Anada ,  Yuichi Yoshii ,  Takuma Wada

IPC: H01L21/683 ,  H01L21/687 ,  H01L21/67

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate including a sealing ring provided at a peripheral edge portion of the ceramic dielectric substrate, and an electrode layer including a plurality of electrode components. An outer perimeter of the ceramic dielectric substrate is provided to cause a spacing between the outer perimeter of the ceramic dielectric substrate and an outer perimeter of the electrode layer to be uniform. The spacing between the outer perimeter of the electrode layer and the outer perimeter of the ceramic dielectric substrate is narrower than a spacing of the electrode components. A width of the sealing ring is not less than 0.3 millimeters and not more than 3 millimeters. A width where the electrode layer overlaps the sealing ring is not less than −0.7 millimeters and not more than 2 millimeters.

公开(公告)号：US09252041B2

公开(公告)日：2016-02-02

申请号：US14012058

申请日：2013-08-28

Applicant: TOTO LTD.

Inventor： Kazuki Anada ,  Takuma Wada

IPC: H01L21/683 ,  H01L21/687

CPC classification number: H01L21/6833 ,  H01L21/68757

Abstract: To provide an electrostatic chuck, including: a ceramic dielectric substrate having a first major surface on which an object to be processed is mounted, and a second major surface on a side opposite the first major surface, the ceramic dielectric substrate being a polycrystalline ceramic sintered body; and an electrode layer interposed between the first major surface and the second major surface of the ceramic dielectric substrate, the electrode layer being integrally sintered with the ceramic dielectric substrate, and the electrode layer includes a first portion having conductivity, and a second portion that bonds the first dielectric layer and the second dielectric layer, and the mean grain size of crystals included in the second portion is smaller than the mean grain size of crystals included in the ceramic dielectric substrate.

Abstract translation: 为了提供一种静电卡盘，其特征在于，包括：陶瓷电介质基板，其具有安装有被加工物的第一主面和与所述第一主面相反的一侧的第二主面，所述陶瓷电介质基板为多晶陶瓷烧结体 身体; 以及插入在所述陶瓷电介质基板的所述第一主表面和所述第二主表面之间的电极层，所述电极层与所述陶瓷电介质基板一体烧结，所述电极层包括具有导电性的第一部分， 第一介电层和第二介电层以及包含在第二部分中的晶体的平均晶粒尺寸小于包括在陶瓷电介质基板中的晶体的平均晶粒尺寸。

公开(公告)号：US09093488B2

公开(公告)日：2015-07-28

申请号：US14344736

申请日：2012-09-27

Applicant: TOTO LTD.

Inventor： Kazuki Anada ,  Kaduko Ishikawa ,  Yuichi Yoshii ,  Junji Yonezawa

IPC: H02N13/00 ,  H01L21/683 ,  H01L21/687

CPC classification number: H01L21/6833 ,  H01L21/6875 ,  H02N13/00

Abstract: According to an aspect of an embodiment of the invention, there is provided an AC-driven electrostatic chuck including: a dielectric substrate including protrusions formed on a major surface on a side of mounting a clamped object, and a bottom surface part formed around the protrusions; and an electrode provided on the dielectric substrate, the electrode including a plurality of electrode elements spaced from each other, the plurality of electrode elements being enabled to be applied with an AC voltage of mutually different phases, respectively, and the protrusions being arranged on the major surface with a prescribed spacing depending on shape of the plurality of electrode elements. The AC-driven electrostatic chuck is capable of suppressing local damage to part of the protrusions provided on the mounting surface side.

Abstract translation: 根据本发明的实施例的一个方面，提供了一种AC驱动的静电卡盘，包括：介质基板，包括形成在安装被夹持物体的一侧上的主表面上的突起，以及形成在突起 ; 以及设置在所述电介质基板上的电极，所述电极包括彼此间隔开的多个电极元件，所述多个电极元件能够分别施加相互不同相的交流电压，并且所述突起布置在 主表面具有取决于多个电极元件的形状的规定间隔。 AC驱动的静电卡盘能够抑制设置在安装表面侧的部分突起的局部损坏。

公开(公告)号：US10373853B2

公开(公告)日：2019-08-06

申请号：US15534798

申请日：2015-12-10

Applicant: TOTO LTD.

Inventor： Kazuki Anada ,  Yuichi Yoshii

IPC: H01L21/683 ,  H01L21/67 ,  B23B31/28

Abstract: An electrostatic chuck includes a ceramic dielectric substrate having a first major surface on which an object to be processed is mounted, and a second major surface, the ceramic dielectric substrate being a polycrystalline ceramic sintered body, an electrode layer provided on the ceramic dielectric substrate, a base plate provided on a side of the second major surface and supporting the ceramic dielectric substrate, and a heater provided between the electrode layer and the base plate. The base plate includes a through hole piercing the base plate and a communication path passing a medium adjusting a temperature of the object to be processed, and when viewed in a direction perpendicular to the first major surface, at least a part of the heater exists on a side of the through hole as viewed from a first portion of the communication path which is closest to the through hole.

公开(公告)号：US09905449B2

公开(公告)日：2018-02-27

申请号：US15452330

申请日：2017-03-07

Applicant: TOTO LTD.

Inventor： Kosuke Yamaguchi ,  Kazuki Anada ,  Tatsuya Koga ,  Hiroki Matsui

IPC: H01L21/683 ,  H02N13/00 ,  H01L21/687

CPC classification number: H01L21/6833 ,  H01L21/6831 ,  H01L21/68757 ,  H01L2221/683 ,  H02N13/00 ,  Y10T279/23 ,  Y10T279/33

Abstract: An electrostatic chuck includes: a ceramic dielectric substrate having a first major surface, a second major surface, and a through-hole; a metallic base plate which has a gas introduction path that communicates with the through-hole; and a bonding layer which is provided between the ceramic dielectric substrate and the base plate and includes a resin material. The bonding layer has a space which is provided between an opening of the through-hole in the second major surface and the gas introduction path and is larger than the opening in a horizontal direction, and a first area in which an end face of the bonding layer on a side of the space intersects with the second major surface being recessed from the opening further than a second area of the end face which is different from the first area.

公开(公告)号：US09627240B2

公开(公告)日：2017-04-18

申请号：US14663526

申请日：2015-03-20

Applicant: TOTO LTD.

Inventor： Kosuke Yamaguchi ,  Kazuki Anada ,  Tatsuya Koga ,  Hiroki Matsui

IPC: H01L21/683 ,  H02N13/00 ,  H01L21/687

CPC classification number: H01L21/6833 ,  H01L21/6831 ,  H01L21/68757 ,  H01L2221/683 ,  H02N13/00 ,  Y10T279/23 ,  Y10T279/33

Abstract: According to an aspect of the invention, there is provided an electrostatic chuck including: a ceramic dielectric substrate having a first major surface, a second major surface, and a through-hole; a metallic base plate which has a gas introduction path that communicates with the through-hole; and a bonding layer which is provided between the ceramic dielectric substrate and the base plate and includes a resin material, the bonding layer having a space which is provided between an opening of the through-hole in the second major surface and the gas introduction path and is larger than the opening in a horizontal direction, and a first area in which an end face of the bonding layer on a side of the space intersects with the second major surface being recessed from the opening further than another second area of the end face which is different from the first area.

公开(公告)号：US20140355170A1

公开(公告)日：2014-12-04

申请号：US14345279

申请日：2012-09-27

Applicant: TOTO LTD.

Inventor： Takuma Wada ,  Kazuki Anada

IPC: H01L21/683

CPC classification number: H01L21/6831 ,  B23Q3/1543 ,  H01L21/67109 ,  H01L21/6833 ,  H01L21/6875

Abstract: An electrostatic chuck includes: a ceramic dielectric substrate having a first major surface and a second major surface; an electrode interposed between the first and second major surfaces; and a connecting part connected to the electrode and including a first region in contact with the electrode, with a first direction being defined as a direction from the first major surface toward the second major surface, and a second direction being defined as a direction orthogonal to the first direction, the first region being configured so that in a cross section of the electrode and the connecting part as viewed in the second direction, an angle on a side of the connecting part between an extension line along outer shape on the side of second major surface of the electrode and a tangential line of outer shape of the connecting part gradually increases in the first direction.

Abstract translation: 静电卡盘包括：具有第一主表面和第二主表面的陶瓷电介质基片; 插入在第一和第二主表面之间的电极; 以及连接部，其与电极连接并且包括与电极接触的第一区域，第一方向被定义为从第一主表面朝向第二主表面的方向，第二方向被定义为与 所述第一方向，所述第一区域被构造为使得在所述电极和所述连接部分的横截面中沿着所述第二方向观察到所述连接部分的沿着外侧的延伸线在所述第二方向上的角度 电极的主表面和连接部的外形的切线在第一方向上逐渐增大。

公开(公告)号：US20140340813A1

公开(公告)日：2014-11-20

申请号：US14344736

申请日：2012-09-27

Applicant: TOTO LTD.

Inventor： Kazuki Anada ,  Kaduko Ishikawa ,  Yuichi Yoshii ,  Junji Yonezawa

IPC: H01L21/683

CPC classification number: H01L21/6833 ,  H01L21/6875 ,  H02N13/00

Abstract: According to an aspect of an embodiment of the invention, there is provided an AC-driven electrostatic chuck including: a dielectric substrate including protrusions formed on a major surface on a side of mounting a clamped object, and a bottom surface part formed around the protrusions; and an electrode provided on the dielectric substrate, the electrode including a plurality of electrode elements spaced from each other, the plurality of electrode elements being enabled to be applied with an AC voltage of mutually different phases, respectively, and the protrusions being arranged on the major surface with a prescribed spacing depending on shape of the plurality of electrode elements. The AC-driven electrostatic chuck is capable of suppressing local damage to part of the protrusions provided on the mounting surface side.

Abstract translation: 根据本发明的实施例的一个方面，提供了一种AC驱动的静电卡盘，包括：介质基板，包括形成在安装被夹持物体的一侧上的主表面上的突起，以及形成在突起 ; 以及设置在所述电介质基板上的电极，所述电极包括彼此间隔开的多个电极元件，所述多个电极元件能够分别施加相互不同相的交流电压，并且所述突起布置在 主表面具有取决于多个电极元件的形状的规定间隔。 AC驱动的静电卡盘能够抑制设置在安装表面侧的部分突起的局部损坏。

公开(公告)号：US09960067B2

公开(公告)日：2018-05-01

申请号：US14777879

申请日：2014-03-27

Applicant: TOTO LTD.

Inventor： Kazuki Anada ,  Yuichi Yoshii

IPC: H01L21/683 ,  H01L21/67

CPC classification number: H01L21/6833 ,  H01L21/67109 ,  H01L21/6831 ,  Y10T279/23

Abstract: According to an aspect of an embodiment of the invention, there is provided an electrostatic chuck including: a ceramic dielectric substrate including a first major surface for mounting a clamped target, a second major surface on opposite side from the first major surface, and a through hole provided from the second major surface to the first major surface; a metallic base plate supporting the ceramic dielectric substrate and including a gas feed channel communicating with the through hole; and an insulator plug including a ceramic porous body provided in the gas feed channel and a ceramic insulating film provided between the ceramic porous body and the gas feed channel and being denser than the ceramic porous body, the ceramic insulating film biting into the ceramic porous body from a surface of the ceramic porous body.

公开(公告)号：US09252040B2

公开(公告)日：2016-02-02

申请号：US14012003

申请日：2013-08-28

Applicant: TOTO LTD.

Inventor： Kazuki Anada ,  Takuma Wada

IPC: H01L21/683 ,  H01L21/687

CPC classification number: H01L21/6833 ,  H01L21/68757

Abstract: To provide an electrostatic chuck, including: a ceramic dielectric substrate having a first major surface on which an object to be processed is mounted, and a second major surface on a side opposite the first major surface, the ceramic dielectric substrate being a polycrystalline ceramic sintered body; and an electrode layer interposed between the first major surface and the second major surface of the ceramic dielectric substrate, the electrode layer being integrally sintered with the ceramic dielectric substrate, the ceramic dielectric substrate including a first dielectric layer between the electrode layer and the first major surface, and a second dielectric layer between the electrode layer and the second major surface, and at least the first dielectric layer of the ceramic dielectric substrate having an infrared spectral transmittance in terms of a thickness of 1 millimeter (mm) of not less than 20%.

Abstract translation: 为了提供一种静电卡盘，其特征在于，包括：陶瓷电介质基板，其具有安装有被加工物的第一主面和与所述第一主面相反的一侧的第二主面，所述陶瓷电介质基板为多晶陶瓷烧结体 身体; 以及插入在所述陶瓷电介质基板的所述第一主表面和所述第二主表面之间的电极层，所述电极层与所述陶瓷电介质基板一体烧结，所述陶瓷电介质基板包括在所述电极层与所述第一主体之间的第一电介质层 表面和第二电介质层之间，并且至少陶瓷电介质基板的第一电介质层的厚度为1毫米（mm）的红外光谱透射率不小于20 ％。