公开(公告)号：US20150316378A1

公开(公告)日：2015-11-05

申请号：US14654154

申请日：2013-12-09

Applicant: TRONICS MICROSYSTEMS S.A.

Inventor： Christophe KERGUERIS ,  Olivier GIGAN ,  Christian PISELLA ,  Yongjun YANG ,  Bo LI ,  Shujing XU

IPC: G01C19/5747

CPC classification number: G01C19/5747

Abstract: A micromechanical sensor device for measuring angular z-axis motion comprises two vibratory structures each having at least one proof mass. A suspension structure maintains the two vibratory structures in a mobile suspended position above the substrate for movement parallel to the substrate plane in drive-mode (x-axis) direction and in sense-mode direction (y-axis). A coupling support structure connects the coupling structure to an anchor structure and enables a rotational swinging movement of the coupling structure, the rotational swinging movement having an axis of rotation that is perpendicular to the substrate plane. Each of the vibratory structures comprises at least one shuttle mass coupled to the at least one proof mass by sense-mode springs, which are more flexible in sense-mode direction than in drive-mode direction (x), for activating a vibration movement of each vibratory structure. A sensing electrode structure for each proof mass is designed for detecting sense-mode movements that are parallel to the substrate plane, The coupling support structure is designed to also enable a translational movement of the coupling structure in drive-mode direction (x).

Abstract translation: 用于测量角度z轴运动的微机械传感器装置包括两个振动结构，每个具有至少一个检验质量。 悬挂结构将两个振动结构保持在基板上方的可移动悬挂位置，以在驱动模式（x轴）方向和感测模式方向（y轴）上平行于基板平面移动。 联接支撑结构将联接结构连接到锚固结构并且能够实现联接结构的旋转摆动运动，旋转摆动运动具有垂直于基板平面的旋转轴线。 每个振动结构包括通过感测模式弹簧耦合到至少一个检测质量块的至少一个穿梭质量，其在感测模式方向上比在驱动模式方向（x）上更灵活，用于激活振动运动 每个振动结构。 用于每个检验质量块的感测电极结构被设计用于检测平行于衬底平面的感测模式运动。耦合支撑结构被设计成还能够实现耦合结构在驱动模式方向（x）上的平移运动。