公开(公告)号：US20120174990A1

公开(公告)日：2012-07-12

申请号：US13348745

申请日：2012-01-12

申请人： Tadahiro YASUDA

发明人： Tadahiro YASUDA

IPC分类号： G05D11/13

CPC分类号： G05D11/132 ,  Y10T137/2521 ,  Y10T137/2524 ,  Y10T137/2529 ,  Y10T137/7762

摘要： The flow rate ratio controlling apparatus comprises differential pressure flow rate controllers (MFC1, MFC2) of the same type and a control processing mechanism (C) for giving commands to the flow rate controllers (MFC1, MFC2) to control them. The flow rate controllers (MFC1, MFC2) are provided with respective branched flow channels (BL1, BL2) branched from a terminal of a main flow channel (ML) in opposite directions. The flow rate controller (MFC1) arranged in the branched flow channel (BL1) is operated so that a detected pressure achieves a predetermined target pressure; a target flow rate for the flow rate controller (MFC2) arranged in the branched flow channel (BL2) is determined from the total measured flow rate and the predetermined flow rate ratio, and the flow rate controller (MFC2) is operated so as to achieve the target flow rate.

摘要翻译： 流量比控制装置包括相同类型的差压流量控制器（MFC1，MFC2）和用于向流量控制器（MFC1，MFC2）发出命令以控制它们的控制处理机构（C）。 流量控制器（MFC1，MFC2）设置有从主流路（ML）的端子沿相反方向分支的各自的分支流路（BL1，BL2）。 布置在分支流路（BL1）中的流量控制器（MFC1）被操作，使得检测压力达到预定的目标压力; 根据总测量流量和预定流量比确定布置在分支流路（BL2）中的流量控制器（MFC2）的目标流量，并且操作流量控制器（MFC2），以实现 目标流量。