公开(公告)号：US4186305A

公开(公告)日：1980-01-29

申请号：US882895

申请日：1978-03-01

申请人： Tadami Taoka ,  Fumio Nakajima ,  Hisashki Kawamura ,  Yutaka Hirano ,  Kimio Maru ,  Kazutoshi Arita ,  Hidemasa Yoshida

发明人： Tadami Taoka ,  Fumio Nakajima ,  Hisashki Kawamura ,  Yutaka Hirano ,  Kimio Maru ,  Kazutoshi Arita ,  Hidemasa Yoshida

IPC分类号： H01J37/20 ,  H01J37/22 ,  H01J37/304

CPC分类号： H01J37/20 ,  H01J37/22 ,  H01J37/304

摘要： The present invention relates to a high-temperature microscope. According to this invention, a specimen is held in vacuum with one side of it heated through exposure to an electron beam and the other side of it observed through an observation window.A curtain of inert gas is formed between the specimen and the observation window to prevent the window from being clouded, i.e., to prevent vapor deposit on the window from the specimen.Visual observation (including photography) and measurement of the specimen temperature by heat radiation therefrom are done individually with different bands of wavelengths. For the purpose of illuminating the specimen, beams of spectral distribution containing the components of in the visible band for observation are used but no components of the temperature-measuring band are utilized as light source. For the purpose of visual observation, a narrow visible band contained in the aforesaid beam located in low brightness in the heat radiation beams from the specimen is utilized.

摘要翻译： 本发明涉及一种高温显微镜。 根据本发明，将样品保持在真空中，其一侧通过暴露于电子束而加热，另一侧通过观察窗观察。 在试样和观察窗之间形成惰性气体帘，防止窗口变得浑浊，即防止气泡沉积在窗户上。 通过不同的波长波段分别进行目视观察（包括摄影）和通过其散热测量样品温度。 为了照射样本，使用包含用于观察的可见光带中的分量的光谱分布光束，但不将温度测量带的分量用作光源。 为了目视观察，利用了在来自样本的热辐射束中位于低亮度的上述光束中的窄的可见光带。