公开(公告)号：US5024570A

公开(公告)日：1991-06-18

申请号：US403355

申请日：1989-09-06

申请人： Tadashi Kiriseko ,  Hiromichi Tani ,  Noriko Soma ,  Nobuhisa Shigemi ,  Takayuki Toyoda

发明人： Tadashi Kiriseko ,  Hiromichi Tani ,  Noriko Soma ,  Nobuhisa Shigemi ,  Takayuki Toyoda

IPC分类号： B65H85/00 ,  H01L21/00 ,  H01L21/677

CPC分类号： H01L21/67173 ,  H01L21/67276 ,  H01L21/67294 ,  H01L21/67727 ,  Y10S414/135 ,  Y10S414/137 ,  Y10S414/14

摘要： A continuous semiconductor substrate processing system is operated by a system control structure in accordance with a predetermined processing program. A wafer conveying mechanism conveys wafers to and from each of plural process stations, each of which performs a corresponding process step on semiconductor wafers, to and from a stocker and to and from an inspection unit. Carriers, movable by manual or mechanical structure other than the wafer conveying mechanism, provide for alternative conveying of wafers to and from each of the process stations, the stocker and the inspection station. The system control structure monitors and selectively controls each of the wafer conveying mechanism, the process stations and the stocker and issues instructions for movement of the carriers and monitors the positioning of carriers for selective control of the transfer of wafers and the priority sequence of processing of wafers, to maintain continuous performance of plural process steps on plural lots of semiconductor wafers.

公开(公告)号：US06314434B1

公开(公告)日：2001-11-06

申请号：US09168221

申请日：1998-10-08

申请人： Nobuhisa Shigemi ,  Hiroyuki Yamamoto ,  Gengo Tazaki ,  Makoto Yoshioka ,  Mitsuhiro Kokubun

发明人： Nobuhisa Shigemi ,  Hiroyuki Yamamoto ,  Gengo Tazaki ,  Makoto Yoshioka ,  Mitsuhiro Kokubun

IPC分类号： G06F1200

CPC分类号： G06F17/2247 ,  G06F17/30607 ,  Y10S707/955 ,  Y10S707/99953 ,  Y10S707/99954

摘要： A structured data management system which provides services concerning a structured electronic data object. In this system, a structured data storage unit stores a plurality of structured data objects associated with each other. Each structured data object can be represented as a tree structure constructed by a plurality of data elements, or nodes. Further, the individual nodes of a tree structure are associated with their respective process scripts. Through an input/output interface unit, a message addressed to a certain destination node arrives. Upon receipt of the message, a structured data processing unit identifies the destination node by tracing the tree structure of a particular structured data object where the destination node resides. The structured data processing unit then executes a process script associated with the destination node being identified. During the execution of this process script, the structured data processing unit may encounter another message that is addressed to a node in a different structured data object. In this case, the structured data processing unit reads out the specified object from the structured data storage unit and executes a process script of that node.

摘要翻译： 一种提供关于结构化电子数据对象的服务的结构化数据管理系统。 在该系统中，结构化数据存储单元存储彼此相关联的多个结构化数据对象。 每个结构化数据对象可以表示为由多个数据元素或节点构成的树结构。 此外，树结构的各个节点与它们各自的处理脚本相关联。 通过输入/输出接口单元，到达某个目标节点的消息到达。 在接收到消息时，结构化数据处理单元通过跟踪目的地节点驻留的特定结构化数据对象的树结构来识别目的地节点。 结构化数据处理单元然后执行与正在识别的目的地节点相关联的处理脚本。 在执行该过程脚本期间，结构化数据处理单元可以遇到寻址到不同结构化数据对象中的节点的另一个消息。 在这种情况下，结构化数据处理单元从结构化数据存储单元读出指定对象，并执行该节点的处理脚本。

公开(公告)号：US06279006B1

公开(公告)日：2001-08-21

申请号：US09172243

申请日：1998-10-14

申请人： Nobuhisa Shigemi ,  Hiroyuki Yamamoto ,  Gengo Tazaki ,  Makoto Yoshioka ,  Mitsuhiro Kokubun

发明人： Nobuhisa Shigemi ,  Hiroyuki Yamamoto ,  Gengo Tazaki ,  Makoto Yoshioka ,  Mitsuhiro Kokubun

IPC分类号： G06F1730

CPC分类号： G06F17/2725 ,  Y10S707/99942 ,  Y10S707/99943 ,  Y10S707/99944

摘要： A structured data management system capable of easily changing the definition of a logical structure and controlling semantics described in data adapted to the defined structure as intended by persons who have defined the logical structure. A contents model defines an internal structure of a contents description. The contents description describes data to be managed according to the contents model. An operation description is coupled to the contents model and manipulates data in the contents description depending on the structure of the data in the contents description. The operation description functions to define semantics of each element of the structure defined by the contents model. An operation description executing unit executes the operation description coupled to the contents model. A structure managing unit verifies and manages the structure of the contents description according to the contents model.

摘要翻译： 一种结构化的数据管理系统，其能够容易地改变逻辑结构的定义并且控制在适合于定义了逻辑结构的人的所定义的结构的数据中描述的语义。 内容模型定义内容描述的内部结构。 内容描述根据内容模型描述要管理的数据。 根据内容描述中的数据的结构，操作描述被耦合到内容模型并且操纵内容描述中的数据。 操作描述用于定义由内容模型定义的结构的每个元素的语义。 操作描述执行单元执行与内容模型相结合的操作描述。 结构管理单元根据内容模型验证和管理内容描述的结构。