公开(公告)号：US20080223412A1

公开(公告)日：2008-09-18

申请号：US12004504

申请日：2007-12-20

申请人： Taek-Youb Lee ,  Bong-Joo Kim

发明人： Taek-Youb Lee ,  Bong-Joo Kim

IPC分类号： B08B3/10

CPC分类号： H01L21/67051 ,  H01L21/6708 ,  H01L21/6838

摘要： A substrate support unit supplies a swirl flow to a substrate to rotate and float the substrate from a chuck plate during a process. A process is performed while rotating and floating the substrate. Thus, the substrate is supported and rotates at a process speed while floating form the chuck plate with a non-contact manner.

摘要翻译： 衬底支撑单元向衬底提供涡流以在过程中从夹盘旋转并浮动衬底。 在旋转和浮动衬底的同时进行处理。 因此，基板被支撑并以处理速度旋转，同时以非接触方式从卡盘盘浮动。

公开(公告)号：US20090090467A1

公开(公告)日：2009-04-09

申请号：US12222148

申请日：2008-08-04

申请人： Taek-Youb Lee

发明人： Taek-Youb Lee

IPC分类号： H01L21/306 ,  B08B7/00

CPC分类号： H01L21/6875 ,  H01L21/67051 ,  H01L21/68764

摘要： Provided is a spin head for supporting and rotating a substrate. The spin head includes a body, chuck pins disposed at the body and movable between supporting positions and rest positions, and a chuck pin moving unit configured to move the chuck pins straight. The chuck pins supports a substrate at the supporting positions and provides a substrate loading/unloading space at the rest position. The chuck pin moving unit includes movable rods fixed to the chuck pins, a rotatable cam including protrusions on an outer surface thereof so as to move the chuck pins from the supporting positions to the rest positions, and chuck pin return units respectively applying forces to the movable rods so as to move the chuck pins individually from the rest positions to the supporting positions. The chuck pin moving unit further includes contact maintaining members.

摘要翻译： 提供了用于支撑和旋转衬底的旋转头。 旋转头包括主体，设置在主体处并在支撑位置和静止位置之间移动的卡盘销，以及配置成使卡盘销直线移动的卡盘销移动单元。 卡盘销在支撑位置处支撑基板，并在静止位置提供基板装载/卸载空间。 卡盘销移动单元包括固定到卡盘销的可动杆，包括在其外表面上的突起的可旋转凸轮，以将卡盘销从支撑位置移动到休止位置;以及卡盘销返回单元，分别施加到 可动杆，以将卡盘销从静止位置移动到支撑位置。 卡盘销移动单元还包括接触保持构件。

公开(公告)号：US20060192400A1

公开(公告)日：2006-08-31

申请号：US11064856

申请日：2005-02-25

申请人： Woo-Young Kim ,  In-Ho Bang ,  Taek-Youb Lee

发明人： Woo-Young Kim ,  In-Ho Bang ,  Taek-Youb Lee

IPC分类号： B65G49/07

CPC分类号： H01L21/68707 ,  Y10S414/141

摘要： The present invention is directed to a wafer transfer apparatus having cylinder-driving movable fingers. The wafer transfer apparatus a robot arm unit whose operation is controlled by driving means, a blade on which a wafer is placed, and a clamping member for locating the wafer placed on the blade in position while fixing the wafer. The blade is installed at the end of the robot arm unit, and-the clamping is installed at the blade.

摘要翻译： 本发明涉及具有气缸驱动活动指状物的晶片传送装置。 晶片传送装置，其操作由驱动装置控制的机器人手臂单元，放置晶片的刀片和用于将晶片放置在刀片上的晶片定位的夹紧构件，同时固定晶片。 刀片安装在机器人手臂单元的末端，夹紧装置安装在刀片上。

公开(公告)号：US08293071B2

公开(公告)日：2012-10-23

申请号：US12222148

申请日：2008-08-04

申请人： Taek-Youb Lee

发明人： Taek-Youb Lee

IPC分类号： H01L21/306

CPC分类号： H01L21/6875 ,  H01L21/67051 ,  H01L21/68764

摘要： Provided is a spin head for supporting and rotating a substrate. The spin head includes a body, chuck pins disposed at the body and movable between supporting positions and rest positions, and a chuck pin moving unit configured to move the chuck pins straight. The chuck pins supports a substrate at the supporting positions and provides a substrate loading/unloading space at the rest position. The chuck pin moving unit includes movable rods fixed to the chuck pins, a rotatable cam including protrusions on an outer surface thereof so as to move the chuck pins from the supporting positions to the rest positions, and chuck pin return units respectively applying forces to the movable rods so as to move the chuck pins individually from the rest positions to the supporting positions. The chuck pin moving unit further includes contact maintaining members.

摘要翻译： 提供了用于支撑和旋转衬底的旋转头。 旋转头包括主体，设置在主体处并在支撑位置和静止位置之间移动的卡盘销，以及配置成使卡盘销直线移动的卡盘销移动单元。 卡盘销在支撑位置处支撑基板，并在静止位置提供基板装载/卸载空间。 卡盘销移动单元包括固定到卡盘销的可动杆，包括在其外表面上的突起的可旋转凸轮，以将卡盘销从支撑位置移动到休止位置;以及卡盘销返回单元，分别施加到 可动杆，以将卡盘销从静止位置移动到支撑位置。 卡盘销移动单元还包括接触保持构件。

公开(公告)号：US07611182B2

公开(公告)日：2009-11-03

申请号：US11064856

申请日：2005-02-25

申请人： Woo-Young Kim ,  In-Ho Bang ,  Taek-Youb Lee

发明人： Woo-Young Kim ,  In-Ho Bang ,  Taek-Youb Lee

IPC分类号： B65G49/07

CPC分类号： H01L21/68707 ,  Y10S414/141

摘要： A wafer transfer apparatus may include a robot arm unit configured to be operated by a driving means, a blade configured to support a wafer and having a fix finger at a first end, and a clamping member attached to the robot arm. The clamping arm may also include a movable finger configured to hold a peripheral edge of the wafer, and a moving pusher attached to the movable finger and configured to guide the movable finger and the wafer on the blade towards the fix finger.

摘要翻译： 晶片传送装置可以包括被配置为由驱动装置操作的机器人臂单元，被配置为支撑晶片并且在第一端具有固定指的刀片以及附接到机器人手臂的夹紧构件。 夹持臂还可以包括被配置为保持晶片的周边边缘的可动指状物，以及附接到可动指状物的移动推动器，并构造成将可动指状物和刀片上的晶片引向固定指。