公开(公告)号：US12286306B2

公开(公告)日：2025-04-29

申请号：US17384360

申请日：2021-07-23

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chieh Hsu ,  Guancyun Li ,  Ching-Jung Chang ,  Chi-Feng Tung ,  Hsiang-Yin Shen

IPC: B65G43/02 ,  B61B3/00 ,  G01B21/22 ,  G01C9/06 ,  G01H1/00 ,  H01L21/677

Abstract: An overhead transport system is provided capable of absorbing abnormal vibration and determining a source of the abnormal vibration. The overhead transport system in accordance with various embodiments of the present disclosure includes a processor, an overhead rail, a plurality of hangers that support the overhead rail, a vibration meter measuring vibration from the overhead rail, and a damper included in each of the hangers. The processor is configured to change a property of the damper in response to a determination that the measured vibration by the vibration meter is indicative of an abnormal vibration.