公开(公告)号：US20210125850A1

公开(公告)日：2021-04-29

申请号：US16667815

申请日：2019-10-29

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yung-Ho Chen ,  Chung-Hsung Yang

IPC: H01L21/677 ,  B65G1/137

Abstract: A system and an operating method for automated wafer carrier handling are provided. The system includes a storage rack including a standby position and a storage position separated from each other, a first and second moving mechanism, and a controller operatively coupled to the first and second moving mechanism to control operations of the first and second moving mechanism. The storage position is for buffering a wafer carrier awaiting transfer to a load port. The first moving mechanism is movably coupled to the storage rack and provides at least one degree of freedom of movement to transfer the wafer carrier from the storage position to the standby position. The second moving mechanism is disposed over the storage rack, operatively coupled the storage rack to the load port, and provides at least one degree of freedom of movement to transfer the wafer carrier from the standby position to the load port.

公开(公告)号：US11551959B2

公开(公告)日：2023-01-10

申请号：US16667815

申请日：2019-10-29

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yung-Ho Chen ,  Chung-Hsung Yang

IPC: H01L21/677 ,  B65G1/137

Abstract: A system and an operating method for automated wafer carrier handling are provided. The system includes a storage rack including a standby position and a storage position separated from each other, a first and second moving mechanism, and a controller operatively coupled to the first and second moving mechanism to control operations of the first and second moving mechanism. The storage position is for buffering a wafer carrier awaiting transfer to a load port. The first moving mechanism is movably coupled to the storage rack and provides at least one degree of freedom of movement to transfer the wafer carrier from the storage position to the standby position. The second moving mechanism is disposed over the storage rack, operatively coupled the storage rack to the load port, and provides at least one degree of freedom of movement to transfer the wafer carrier from the standby position to the load port.