公开(公告)号：US20220283520A1

公开(公告)日：2022-09-08

申请号：US17476420

申请日：2021-09-15

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Rong-Syuan FAN ,  Ching-Jung CHANG ,  Chi-Feng TUNG ,  Hsiang-Yin SHEN

IPC: G03F7/20

Abstract: A method includes: storing a carrier containing material in a storage; recording environmental data of the storage to a database while the material is in the storage; generating a forecast for the material in the carrier based on the environmental data; receiving a request for the material from a semiconductor fabrication tool; and providing the carrier to the semiconductor fabrication tool based on the forecast.

公开(公告)号：US20230341787A1

公开(公告)日：2023-10-26

申请号：US18342635

申请日：2023-06-27

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Rong-Syuan FAN ,  Chi-Feng TUNG ,  Ching-Jung CHANG ,  Hsiang-Yin SHEN

IPC: G03F7/20

CPC classification number: G03F7/70858

Abstract: A method includes: storing a carrier containing material in a storage; recording environmental data of the storage to a database while the material is in the storage; generating a forecast for the material in the carrier based on the environmental data; receiving a request for the material from a semiconductor fabrication tool; and providing the carrier to the semiconductor fabrication tool based on the forecast.