公开(公告)号：US20150131070A1

公开(公告)日：2015-05-14

申请号：US14080501

申请日：2013-11-14

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Chi-Feng TUNG ,  Hsiang-Yin SHEN ,  Mao-Lin KAO ,  Chih-Cheng HSIAO

IPC: G03F7/20

CPC classification number: G03F7/70741 ,  H01L21/67721 ,  H01L21/67733 ,  H01L21/67736

Abstract: A photolithography system includes a photo-mask storage, at least one photolithography machine and an overhead crane for transporting at least one photo-mask at least between the photo-mask storage and the photolithography machine. The overhead crane includes at least one main rail, a mask girder, a mask hoist and a mask holding device. The mask girder is coupled with the main rail and movable at least between a first position above the photo-mask storage and a second position above the photolithography machine. The mask hoist is movably coupled with the mask girder. The mask holding device is coupled with the mask hoist.

Abstract translation: 光刻系统包括光掩模存储器，至少一个光刻机和用于至少在光掩模存储器和光刻机之间传送至少一个光掩模的高架起重机。 所述起重机包括至少一个主轨道，掩模梁，掩模提升机和掩模保持装置。 掩模梁与主轨道耦合并且至少在光掩模存储器上方的第一位置和光刻机上方的第二位置之间可移动。 面罩提升机可移动地与掩模大梁相连。 面罩保持装置与面罩提升机相连。

公开(公告)号：US20230341787A1

公开(公告)日：2023-10-26

申请号：US18342635

申请日：2023-06-27

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Rong-Syuan FAN ,  Chi-Feng TUNG ,  Ching-Jung CHANG ,  Hsiang-Yin SHEN

IPC: G03F7/20

CPC classification number: G03F7/70858

Abstract: A method includes: storing a carrier containing material in a storage; recording environmental data of the storage to a database while the material is in the storage; generating a forecast for the material in the carrier based on the environmental data; receiving a request for the material from a semiconductor fabrication tool; and providing the carrier to the semiconductor fabrication tool based on the forecast.

公开(公告)号：US20220283520A1

公开(公告)日：2022-09-08

申请号：US17476420

申请日：2021-09-15

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Rong-Syuan FAN ,  Ching-Jung CHANG ,  Chi-Feng TUNG ,  Hsiang-Yin SHEN

IPC: G03F7/20

Abstract: A method includes: storing a carrier containing material in a storage; recording environmental data of the storage to a database while the material is in the storage; generating a forecast for the material in the carrier based on the environmental data; receiving a request for the material from a semiconductor fabrication tool; and providing the carrier to the semiconductor fabrication tool based on the forecast.

公开(公告)号：US20170148651A1

公开(公告)日：2017-05-25

申请号：US15365455

申请日：2016-11-30

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Mao-Lin KAO ,  Hsu-Shui LIU ,  Jiun-Rong PAI ,  Li-Jen KO ,  Hsiang-Yin SHEN ,  Tien-Chen HU

IPC: H01L21/67 ,  H01L21/687

CPC classification number: H01L21/67184 ,  H01L21/67161 ,  H01L21/67167 ,  H01L21/67201 ,  H01L21/68707

Abstract: A semiconductor processing station is provided. The semiconductor processing station includes a first platform, a second platform and a vacuum tunnel, wherein the first platform has a first load lock and a first plurality of chambers, and the second platform has a second load lock and a second plurality of chambers, and the vacuum tunnel connects the first and the second load locks.

公开(公告)号：US20250068088A1

公开(公告)日：2025-02-27

申请号：US18946633

申请日：2024-11-13

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Guancyun LI ,  Ching-Jung CHANG ,  Chi-Feng TUNG ,  Hsiang-Yin SHEN

IPC: G03F7/00 ,  G05B19/4155 ,  G06N20/00

Abstract: An EUV stocker and an EUV pod device is disclosed. The EUV stocker includes an AI driven dynamic control circuitry, an AI controlled safety interlock, and an independent air return control device. The EUV stocker includes a Mass Flow Control (MFC) that operates in conjunction with one or more valves. The EUV stocker further includes a hydrocarbon detecting assembly, oxygen detecting assembly, pressure detecting assembly, and temperature detecting assembly and more to maintain the required condition within the EUV stocker. The EUV stocker also includes automated transportation devices such as AMHS, OHT, MR, AGV, RGV, or the like to provide a safe EUV mask storage environment for operators.

公开(公告)号：US20230066297A1

公开(公告)日：2023-03-02

申请号：US17461703

申请日：2021-08-30

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Guancyun LI ,  Ching-Jung CHANG ,  Chi-Feng TUNG ,  Hsiang-Yin SHEN

IPC: G03F7/20 ,  G06N20/00 ,  G05B19/4155

Abstract: An EUV stocker and an EUV pod device is disclosed. The EUV stocker includes an AI driven dynamic control circuitry, an AI controlled safety interlock, and an independent air return control device. The EUV stocker includes a Mass Flow Control (MFC) that operates in conjunction with one or more valves. The EUV stocker further includes a hydrocarbon detecting assembly, oxygen detecting assembly, pressure detecting assembly, and temperature detecting assembly and more to maintain the required condition within the EUV stocker. The EUV stocker also includes automated transportation devices such as AMHS, OHT, MR, AGV, RGV, or the like to provide a safe EUV mask storage environment for operators.

公开(公告)号：US20220289492A1

公开(公告)日：2022-09-15

申请号：US17384360

申请日：2021-07-23

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chieh HSU ,  Guancyun LI ,  Ching-Jung CHANG ,  Chi-Feng TUNG ,  Hsiang-Yin SHEN

IPC: B65G43/02 ,  G01C9/06 ,  G01H1/00 ,  G01B21/22 ,  B61B3/00 ,  H01L21/677

Abstract: An overhead transport system is provided capable of absorbing abnormal vibration and determining a source of the abnormal vibration. The overhead transport system in accordance with various embodiments of the present disclosure includes a processor, an overhead rail, a plurality of hangers that support the overhead rail, a vibration meter measuring vibration from the overhead rail, and a damper included in each of the hangers. The processor is configured to change a property of the damper in response to a determination that the measured vibration by the vibration meter is indicative of an abnormal vibration.