公开(公告)号：US20240377660A1

公开(公告)日：2024-11-14

申请号：US18402065

申请日：2024-01-02

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Ming Lee ,  Tien-Lin Shen ,  Wei-Heng Lin ,  Hsing-Kuo Hsia ,  Chen-Hua Yu

IPC: G02F1/017

Abstract: An optical device and method of manufacture is presented. In embodiments a method includes forming a first layer of optical material, patterning the first layer into a stair-step pattern, depositing a dielectric material onto the stair-step pattern, and forming a second layer of optical material over the dielectric material and at least partially within the stair-step pattern.

公开(公告)号：US20240377662A1

公开(公告)日：2024-11-14

申请号：US18415092

申请日：2024-01-17

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Ming Lee ,  Tien-Lin Shen ,  Wei-Heng Lin ,  Hsing-Kuo Hsia ,  Chen-Hua Yu

IPC: G02F1/025 ,  G02F1/015

Abstract: An optical device and methods of manufacturing such optical devices are presented. In embodiments the optical device is a tunable beam splitter which is made by forming a first dopant region over a substrate, the first dopant region comprising a first waveguide and a second waveguide, depositing a cladding material over the first waveguide and the second waveguide, and forming a second dopant region overlying the first waveguide and the second waveguide, wherein the forming the second dopant region comprises forming a first region extending over both the first waveguide and the second waveguide, the first region having a constant concentration of a first dopant.