公开(公告)号：US10131539B2

公开(公告)日：2018-11-20

申请号：US15725752

申请日：2017-10-05

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chin-Han Meng ,  Chih-Hsien Hsu ,  Chia-Chi Chung ,  Yu-Pei Chiang ,  Wen-Chih Chen ,  Chen-Huang Huang ,  Zhi-Sheng Xu ,  Jr-Sheng Chen ,  Kuo-Chin Liu ,  Lin-Ching Huang

IPC: B81C1/00 ,  H01H59/00 ,  H01G5/18 ,  B81B3/00

Abstract: A method for forming a micro-electro-mechanical system (MEMS) device structure is provided. The method includes forming a second substrate over a first substrate, and a cavity is formed between the first substrate and the second substrate. The method includes forming a hole through the second substrate using an etching process, and the hole is connected to the cavity. The etching process includes a plurality of etching cycles, and each of the etching cycles includes an etching step, and the etching step has a first stage and a second stage. The etching time of each of the etching steps during the second stage is gradually increased as the number of etching cycles is increased.