公开(公告)号：US10325796B2

公开(公告)日：2019-06-18

申请号：US15797466

申请日：2017-10-30

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yi-Feng Chen ,  Yan Cing Lin ,  Chui-Ya Peng

IPC: H01L21/677 ,  H01L21/687 ,  G01B5/30 ,  H01L21/66 ,  H01L21/67

Abstract: An apparatus includes a holder configured to carry one or more semiconductor wafers, an arm coupled with the holder, and a detector coupled with either the holder or the arm. The detector is configured to measure a change in weight of the one or more semiconductor wafers. The detector includes a strain gauge weight sensor, a piezoelectric sensor, or any other suitable sensor. The change in weight of the one or more semiconductor wafers is used to determine any possible presence of a broken or missing wafer.

公开(公告)号：US20190131157A1

公开(公告)日：2019-05-02

申请号：US15797466

申请日：2017-10-30

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yen-Fong Chen ,  Yan Cing Lin ,  Chui-Ya Peng

IPC: H01L21/677 ,  H01L21/687 ,  H01L21/67 ,  H01L21/66 ,  G01B5/30

Abstract: An apparatus includes a holder configured to carry one or more semiconductor wafers, an arm coupled with the holder, and a detector coupled with either the holder or the arm. The detector is configured to measure a change in weight of the one or more semiconductor wafers. The detector includes a strain gauge weight sensor, a piezoelectric sensor, or any other suitable sensor. The change in weight of the one or more semiconductor wafers is used to determine any possible presence of a broken or missing wafer.