公开(公告)号：US20230062076A1

公开(公告)日：2023-03-02

申请号：US17460738

申请日：2021-08-30

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Ming-Cheng HSU ,  Te-Kun LIN ,  Yu-Hsien TSAI ,  Wen-Tsai SU

IPC: G01R1/073 ,  G01L5/00 ,  G01S17/08

Abstract: An apparatus is provided. The apparatus includes a stage and a plate disposed on the stage. The apparatus further includes a pressure film sensor that is formed on the plate and configured to detect a contact force between a plurality of needles on a probe head of a probe card and the pressure film sensor. The apparatus still includes a distance detector that is configured to detect a distance between the pressure film sensor and the needles. In addition, the apparatus includes an adjustment driver that is configured to adjust the probe card based on the detected contact force of the pressure film sensor.

公开(公告)号：US20240361354A1

公开(公告)日：2024-10-31

申请号：US18765676

申请日：2024-07-08

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Ming-Cheng HSU ,  Te-Kun LIN ,  Yu-Hsien TSAI ,  Wen-Tsai SU

IPC: G01R1/073 ,  G01L5/00 ,  G01S17/08

CPC classification number: G01R1/07342 ,  G01L5/00 ,  G01S17/08

Abstract: A method for detecting a contact force of a probe card is provided. The method includes contacting a pressure film sensor with a plurality of needles over a lower surface of the probe card. The method includes detecting the contact force of the probe card via the pressure film sensor. The method also includes adjusting a position of a push base over an upper surface of the probe card based on the detected contact force of the pressure film sensor.