公开(公告)号：US20110174800A1

公开(公告)日：2011-07-21

申请号：US13000140

申请日：2009-09-25

申请人： Takashi Chino ,  Satoshi Gomi ,  Koichi Miyashita ,  Minoru Nagasawa ,  Yoshie Eda

发明人： Takashi Chino ,  Satoshi Gomi ,  Koichi Miyashita ,  Minoru Nagasawa ,  Yoshie Eda

IPC分类号： H05B3/68

CPC分类号： H01L21/67259 ,  C23C16/4583 ,  C23C16/4586 ,  C23C16/46 ,  C23C16/52

摘要： A method of detecting an abnormal placement of a substrate W, which is carried out when a substrate W placed on a substrate table 3, in which a heater 6a, 6b is disposed, is processed by heating. The method of detecting an abnormal placement of the substrate comprises the steps of: during processing of the substrate W, based on information about an electric output to the heater 6a, 6b or information about a measured temperature of the substrate table 3, detecting of a maximum value and a minimum value of the electric output or the measured temperature, or an integrated value of the electric output or the measured temperature; and judging of the abnormal placement of the substrate based on the maximum value and the minimum value detected, or the integrated value detected.

摘要翻译： 当放置加热器6a，6b的衬底W上的衬底W进行加热时，检测衬底W的异常放置的方法。 检测基板的异常放置的方法包括以下步骤：在基板W的处理期间，基于关于加热器6a，6b的电输出的信息或关于基板台3的测量温度的信息，检测基板 电输出或测量温度的最大值和最小值，或电输出或测量温度的积分值; 以及基于检测到的最大值和最小值或检测到的积分值判断基板的异常放置。

公开(公告)号：US08581153B2

公开(公告)日：2013-11-12

申请号：US13000140

申请日：2009-09-25

申请人： Takashi Chino ,  Satoshi Gomi ,  Koichi Miyashita ,  Minoru Nagasawa ,  Yoshie Eda

发明人： Takashi Chino ,  Satoshi Gomi ,  Koichi Miyashita ,  Minoru Nagasawa ,  Yoshie Eda

IPC分类号： H05B3/68

CPC分类号： H01L21/67259 ,  C23C16/4583 ,  C23C16/4586 ,  C23C16/46 ,  C23C16/52

摘要： A method of detecting an abnormal placement of a substrate W, which is carried out when a substrate W placed on a substrate table 3, in which a heater 6a, 6b is disposed, is processed by heating. The method of detecting an abnormal placement of the substrate comprises the steps of: during processing of the substrate W, based on information about an electric output to the heater 6a, 6b or information about a measured temperature of the substrate table 3, detecting of a maximum value and a minimum value of the electric output or the measured temperature, or an integrated value of the electric output or the measured temperature; and judging of the abnormal placement of the substrate based on the maximum value and the minimum value detected, or the integrated value detected.

摘要翻译： 当放置加热器6a，6b的衬底W上的衬底W进行加热时，检测衬底W的异常放置的方法。 检测基板的异常放置的方法包括以下步骤：在基板W的处理期间，基于关于加热器6a，6b的电输出的信息或关于基板台3的测量温度的信息，检测基板 电输出或测量温度的最大值和最小值，或电输出或测量温度的积分值; 以及基于检测到的最大值和最小值或检测到的积分值判断基板的异常放置。